MEMS mass spectrometers: the next wave of miniaturization

被引：45

作者：

Syms, Richard R. A. ^{[1
]}

Wright, Steven ^{[2
]}

机构：

[1] Univ London Imperial Coll Sci Technol & Med, EEE Dept, Exhibit Rd, London SW7 1AZ, England

[2] Microsa Syst, GMS House,Boundary Rd, Woking GU21 5BX, Surrey, England

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 2016年 / 26卷 / 02期

关键词：

mass spectrometer; mass filter; MEMS; CYLINDRICAL ION-TRAP; PORTABLE GAS-CHROMATOGRAPH; DESORPTION ELECTROSPRAY-IONIZATION; CHEMICAL WARFARE AGENTS; TOTAL ANALYSIS SYSTEMS; CAPILLARY-ELECTROPHORESIS; LIQUID-CHROMATOGRAPHY; MAGNETIC-SECTOR; HIGH-RESOLUTION; LOW-COST;

D O I：

10.1088/0960-1317/26/2/023001

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper reviews mass spectrometers based on micro-electro-mechanical systems (MEMS) technology. The MEMS approach to integration is first briefly described, and the difficulties of miniaturizing mass spectrometers are outlined. MEMS components for ionization and mass filtering are then reviewed, together with additional components for ion detection, vacuum pressure measurement and pumping. Mass spectrometer systems containing MEMS sub-components are then described, applications for miniaturized and portable systems are discussed, and challenges and opportunities are presented.

引用

页数：28

共 50 条

[1] Recent advances in MEMS mass spectrometers
Cheng, Yu-Peng
Liu, You-Jiang
Hu, Jun
Li, Shan
Shao, Lei
Wu, Zhang-Xu
Chen, Chi-Lai
CHINESE JOURNAL OF ANALYTICAL CHEMISTRY, 2022, 50 (01) : 60 - 72
[2] MINIATURIZATION IN MASS SPECTROMETRY
Mielczarek, Przemyslaw
Silberring, Jerzy
Smoluch, Marek
MASS SPECTROMETRY REVIEWS, 2020, 39 (5-6) : 453 - 470
[3] Advances in microfabricated mass spectrometers
Syms, R. R. A.
ANALYTICAL AND BIOANALYTICAL CHEMISTRY, 2009, 393 (02) : 427 - 429
[4] Miniature Mass Spectrometers
Ouyang, Zheng
Cooks, R. Graham
ANNUAL REVIEW OF ANALYTICAL CHEMISTRY, 2009, 2 : 187 - 214
[5] Advances in microfabricated mass spectrometers
R. R. A. Syms
Analytical and Bioanalytical Chemistry, 2009, 393 : 427 - 429
[6] Mass Analyzers and Mass Spectrometers
Haag, Anthony M.
MODERN PROTEOMICS - SAMPLE PREPARATION, ANALYSIS AND PRACTICAL APPLICATIONS, 2016, 919 : 157 - 169
[7] A concept of MEMS mass spectrometer
Szyszka, Piotr
Grzebyk, Tomasz
Gorecka-Drzazga, Anna
Dziuban, Jan A.
2018 XV INTERNATIONAL SCIENTIFIC CONFERENCE ON OPTOELECTRONIC AND ELECTRONIC SENSORS (COE), 2018,
[8] Simulation of ion-optical systems for mass spectrometers with a quadrupole mass filter
A. A. Trubitsyn
Technical Physics, 2003, 48 : 793 - 794
[9] Simulation of ion-optical systems for mass spectrometers with a quadrupole mass filter
Trubitsyn, AA
TECHNICAL PHYSICS, 2003, 48 (06) : 793 - 794
[10] Optical MEMS for high-end micro-spectrometers
Riesenberg, R
Wuttig, A
Nitzsche, G
Harnisch, B
MEMS/MOEMS TECHNOLOGIES AND APPLICATIONS, 2002, 4928 : 6 - 14

← 1 2 3 4 5 →