Crystallization and high temperature functional properties in CoFeB films

被引:5
作者
Wang, Ke [1 ]
Huang, Ya [1 ]
Xu, Zhan [1 ]
Hu, Yiyang [1 ]
Dong, Shuo [1 ]
机构
[1] Huaqiao Univ, Coll Informat Sci & Engn, Xiamen 361021, Peoples R China
关键词
Magnetic films and multilayers; Metal alloys; Order-disorder effects; Thermodynamic properties;
D O I
10.1016/j.ssc.2016.03.001
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
CoFeB alloy films have been attracting much research interest for the applications in magnetoelectronic devices. In this study, crystallization and high temperature functional properties in the sputtered CoFeB alloy films were investigated. The as-deposited alloy films were amorphous and a nanocrystalline structure was formed after annealing, confirmed by X-ray measurements. Large variation in saturation magnetization with temperature was observed in thermomagnetic measurements, reflecting the interplay between crystallization and temperature dependent magnetization in the ferromagnetic alloy film. Pronounced changes in electrical resistivity and optical reflectance with temperature were observed in the alloy film, in accompany with the structural change. The activation barrier for crystallization was determined to be 1.32 eV from the electrical measurements, showing a good thermal stability of the alloy film. (C) 2016 Elsevier Ltd. All rights reserved.
引用
收藏
页码:31 / 34
页数:4
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