Fabrication of 2-μm wide poly-crystalline diamond channels using silicon molds for micro-fluidic applications

被引：21

作者：

Guillaudeu, S ^{[1
]}

Zhu, X ^{[1
]}

Aslam, DM ^{[1
]}

机构：

[1] Michigan State Univ, Dept Elect & Comp Engn, E Lansing, MI 48824 USA

来源：

基金：

美国国家科学基金会;

关键词：

biomedical applications; diamond; free-standing; micro structure; MEMS; BioMEMS;

D O I：

10.1016/S0925-9635(02)00286-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The deposition of poly-crystalline diamond (poly-C) in narrow silicon channels has been accomplished, resulting in narrow freestanding diamond channels. The channels were seeded using a combination of ultrasonic stirring and electrophoresis in a diamond/isopropanol solution. These channels have openings with thicknesses as low as similar to2 mum. The use of such diamond channels for picoliter chemical transfer or storage is proposed. Narrow micro-fluidic channels made completely of poly-C have been fabricated for the first time. (C) 2002 Elsevier Science B.V. All rights reserved.

引用

页码：65 / 69

页数：5

共 12 条

[1] Electrophoretic deposition of nanosized diamond particles [J].

Affoune, AM ;

Prasad, BLV ;

Sato, H ;

Enoki, T .

LANGMUIR, 2001, 17 (02) :547-551

[2]

CHOI WB, 1995, APPL PHYS LETT, V68, P792

[3]

Deguchi M, 1997, DIAMOND FILM TECHNOL, V7, P273

[4] Synthesis of (111) oriented diamond thin films by electrophoretic deposition process [J].

Lee, DG ;

Singh, RK .

APPLIED PHYSICS LETTERS, 1997, 70 (12) :1542-1544

[5]

MAILLARDSCHALLE.E, 1998, DIAM RELAT MATER, V8, P805

[6] DIAMOND NUCLEATION ON SURFACES USING CARBON CLUSTERS [J].

MEILUNAS, RJ ;

CHANG, RPH .

JOURNAL OF MATERIALS RESEARCH, 1994, 9 (01) :61-79

[7] FABRICATION OF MICROCHANNELS IN SYNTHETIC POLYCRYSTALLINE DIAMOND THIN-FILMS FOR HEAT SINKING APPLICATIONS [J].

RAMESHAM, R ;

ROPPEL, T ;

ELLIS, C ;

ROSE, MF .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1991, 138 (06) :1706-1709

[8]

REBELLO JHD, 1991, MATER MANUF PROCESS, V6, P501

[9] SELECTED-AREA NUCLEATION AND PATTERNING OF DIAMOND THIN-FILMS BY ELECTROPHORETIC SEEDING [J].

VALDES, JL ;

MITCHEL, JW ;

MUCHA, JA ;

SEIBLES, L ;

HUGGINS, H .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1991, 138 (02) :635-636

[10] EFFECT OF ULTRAHIGH NUCLEATION DENSITY ON DIAMOND GROWTH AT DIFFERENT GROWTH-RATES AND TEMPERATURES [J].

YANG, GS ;

ASLAM, M ;

KUO, KP ;

REINHARD, DK ;

ASMUSSEN, J .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1995, 13 (03) :1030-1036

← 1 2 →