Evolutionary design optimization of MEMS: a review of its history and state-of-the-art

被引:9
|
作者
Wang, Pan [1 ]
Lu, Qibing [2 ]
Fan, Zhun [3 ]
机构
[1] Wuhan Univ Technol, Sch Automat, Wuhan, Hubei, Peoples R China
[2] Wuhan Univ Technol, Sch Mech & Elect Engn, Wuhan, Hubei, Peoples R China
[3] Shantou Univ, Sch Engn, Shantou, Peoples R China
来源
CLUSTER COMPUTING-THE JOURNAL OF NETWORKS SOFTWARE TOOLS AND APPLICATIONS | 2019年 / 22卷 / Suppl 4期
基金
中国国家自然科学基金;
关键词
Micro-Electro-Mechanical-Systems (MEMS); Design optimization; Evolutionary design; Evolutionary computation; Enterprise systems; ALGORITHM;
D O I
10.1007/s10586-018-2085-3
中图分类号
TP [自动化技术、计算机技术];
学科分类号
0812 ;
摘要
As an important part of the internet of things (IoTs) and cyber-physical systems (CPS), Micro-Electro-Mechanical-Systems (MEMS) is playing more and more irreplaceable role in current industrial community and the forthcoming era of the Industry 4.0. The limitations of some frequently used design methods for MEMS design optimization are analyzed in this review. In order to overcome these difficulties, a recent trend in design optimization of MEMS is inspired by the natural evolution mechanism. Many powerful techniques, especially the evolutionary computation (EC), have been used for the design optimization of MEMS. This paper presents a review of the achievements in this promising research area which utilizes EC methods for the design optimization of MEMS and also proposes three open issues that it is facing.
引用
收藏
页码:S9105 / S9111
页数:7
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