A two degrees-of-freedom piezoelectric single-crystal micromotor

被引：38
作者：
Chen, Zhijiang [1 ]
Li, Xiaotian [1 ]
Liu, Guoxi [1 ]
Dong, Shuxiang [1 ]
机构：
[1] Peking Univ, Coll Engn, Dept Mat Sci & Engn, Beijing 100871, Peoples R China
来源：
JOURNAL OF APPLIED PHYSICS | 2014年 / 116卷 / 22期
基金：
中国国家自然科学基金;
关键词：
ULTRASONIC MOTORS; ACTUATOR;
D O I：
10.1063/1.4903834
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
A two degrees-of-freedom (DOF) ultrasonic micromotor made of piezoelectric Pb(In1/2Nb1/2) O-3-Pb(Mg1/3Nb2/3)O-3-PbTiO3 (PIN-PMN-PT) single crystal square-bar (dimensions 2 x 2 x 9 mm(3)) was developed. The PIN-PMN-PT square-bar stator can generate standing wave elliptical motions in two orthogonal vertical planes by combining the first longitudinal and second bending vibration modes, enabling it to drive a slider in two orthogonal directions. The relatively large driving forces of 0.25 N and motion speed of 35 mm/s were obtained under a voltage of 80 V-pp at its resonance frequency of 87.5 kHz. The proposed micromotor has potential for applications in micro robots, cell manipulators, and digital cameras as a two-DOF actuator. (C) 2014 AIP Publishing LLC.
引用
收藏
页数：5
相关论文
共 29 条
  • [1] Amano T, 1998, ULTRASON, P667, DOI 10.1109/ULTSYM.1998.762236
  • [2] Multi-degree-of-freedom ultrasonic motors for mass-consumer devices
    Bansevicius, R.
    Blechertas, V.
    [J]. JOURNAL OF ELECTROCERAMICS, 2008, 20 (3-4) : 221 - 224
  • [3] Bolognesi P., 2004, ICEM 2004 C, P5
  • [4] A high-temperature piezoelectric linear actuator operating in two orthogonal first bending modes
    Chen, Jianguo
    Chen, Zhijiang
    Li, Xiaotian
    Dong, Shuxiang
    [J]. APPLIED PHYSICS LETTERS, 2013, 102 (05)
  • [5] Modeling and experimental validation of new two degree-of-freedom piezoelectric actuators
    Chen, W. M.
    Liu, T. S.
    [J]. MECHATRONICS, 2013, 23 (08) : 1163 - 1170
  • [6] Piezoelectric ultrasonic bidirectional linear actuator for micropositioning fulfilling Feynman's criteria
    Friend, James
    Yeo, Leslie
    Hogg, Matt
    [J]. APPLIED PHYSICS LETTERS, 2008, 92 (01)
  • [7] A miniaturization of the multi-degree-of-freedom ultrasonic actuator using a small cylinder fixed on a substrate
    Gouda, Yasuyuki
    Nakamura, Kentaro
    Ueha, Sadayuki
    [J]. ULTRASONICS, 2006, 44 : E617 - E620
  • [8] Three-Degree-of-Freedom Ultrasonic Motor Using a 5-mm-Diameter Piezoelectric Ceramic Tube
    Guo, Mingsen
    Hu, Junhui
    Zhu, Hua
    Zhao, Chunsheng
    Dong, Shuxiang
    [J]. IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 2013, 60 (07) : 1446 - 1452
  • [9] Standing wave bi-directional linearly moving ultrasonic motor
    He, SY
    Chen, WS
    Tao, X
    Chen, ZL
    [J]. IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 1998, 45 (05) : 1133 - 1139
  • [10] Advanced piezoelectric single crystal based actuators
    Jiang, XN
    Rehrig, PW
    Hackenberger, WS
    Smith, E
    Dong, SX
    Viehland, D
    Moore, J
    Patrick, B
    [J]. Smart Structures and Materials 2005: Active Materials: Behavior and Mechanics, 2005, 5761 : 253 - 262
123