Modelling and simulation of electromechanical systems in the case of micromirrors

被引：0

作者：

Enge, O ^{[1
]}

Maisser, P ^{[1
]}

Kielau, G ^{[1
]}

机构：

[1] Chemnitz Univ Technol, Inst Mechatron, D-09126 Chemnitz, Germany

来源：

NON-LINEAR ELECTROMAGNETIC SYSTEMS - ISEM '99 | 2000年

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Electromechanical systems (EMS) are characterized by interaction of electromagnetic fields with inertial bodies. Discrete EMS are described by coupling the dynamics of multibody systems and Kirchhoff's theory. For an efficient dynamic simulation, a mathematical model based on a unified approach is necessary. In this paper, the modelling of discrete electromechanical systems in the case of electrostatically driven micromirrors is described. A mathematical frame suitable for solving so-called Inverse Problems in mechatronic systems is presented.

引用

页码：563 / 566

页数：4

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