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Actinic Damage of Y/Mo Multilayer Bragg-Optics by a Tabletop Plasma-driven Extreme Ultraviolet Laser
被引：0
|作者：
Bleiner, Davide
[1
]
机构：
[1] Empa Mat & Technol, Uberlandstr 129, CH-8600 Dubendorf, Switzerland
来源：
OPTICS DAMAGE AND MATERIALS PROCESSING BY EUV/X-RAY RADIATION VII
|
2019年
/
11035卷
关键词：
multilayer;
extreme ultraviolet;
EUV;
X-ray Laser;
damage;
FFT;
D O I：
10.1117/12.2520899
中图分类号：
O43 [光学];
学科分类号：
070207 ;
0803 ;
摘要：
Actinic irradiation (i.e. using ionizing light) of EUV pulses on a multilayer Bragg optics was investigated for characterizing the chemical effects. Photothermal effects are ruled out by the low repetition rate and low absolute energy of the EUV pulses. This would exclude the formation of melt-related particles, which have been however observed. Alternative explanations are discussed. The analysis concentrate on the structure and composition of the multilayer stack, with the aim of quantifying the kinetics.
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