Strength distribution of single-crystal silicon theta-like specimens

被引：25
|
作者：
Gaither, Michael S. [1 ]
DelRio, Frank W. [1 ]
Gates, Richard S. [1 ]
Fuller, Edwin R., Jr. [1 ]
Cook, Robert F. [1 ]
机构：
[1] Natl Inst Stand & Technol, Div Ceram, Mat Sci & Engn Lab, Gaithersburg, MD 20899 USA
来源：
SCRIPTA MATERIALIA | 2010年 / 63卷 / 04期
关键词：
Finite element methods; Fracture strength; Microelectromechanical systems; Single-crystal silicon; MEASURING MECHANICAL-PROPERTIES; FRACTURE STRENGTH; SMALL-SCALE; MODULI;
D O I：
10.1016/j.scriptamat.2010.04.047
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
A new test specimen was developed for micro-scale tensile strength measurements, allowing direct assessment of surface effects on strength. Specimens were formed by deep reactive ion etching, tested with instrumented indentation, and test results interpreted using finite element analyses. Fracture strengths as great as 3 GPa were observed, with fracture initiating at processing-induced flaws and propagating along {1 1 1} and {1 1 0} planes. Published by Elsevier Ltd. on behalf of Acta Materialia Inc.
引用
收藏
页码：422 / 425
页数：4
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