Bulk sensitive hard x-ray photoemission electron microscopy

被引:24
作者
Patt, M. [1 ,2 ]
Wiemann, C. [1 ,2 ]
Weber, N. [3 ]
Escher, M. [3 ]
Gloskovskii, A. [4 ]
Drube, W. [4 ]
Merkel, M. [3 ]
Schneider, C. M. [1 ,2 ,5 ,6 ]
机构
[1] Peter Grunberg Inst PGI 6, D-52425 Julich, Germany
[2] Res Ctr Julich, JARA FIT, D-52425 Julich, Germany
[3] Focus GmbH, D-65510 Hunstetten, Germany
[4] DESY, DESY Photon Sci, D-22603 Hamburg, Germany
[5] Univ Duisburg Essen, Fak Phys, D-47048 Duisburg, Germany
[6] Univ Duisburg Essen, Ctr Nanointegrat Duisburg Essen CeNIDE, D-47048 Duisburg, Germany
关键词
MEAN FREE PATHS; ATTENUATION LENGTHS; PHOTOELECTRON-SPECTROSCOPY; ESCAPE DEPTHS; SCATTERING; SOLIDS; ANGLE;
D O I
10.1063/1.4902141
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
Hard x-ray photoelectron spectroscopy (HAXPES) has now matured into a well-established technique as a bulk sensitive probe of the electronic structure due to the larger escape depth of the highly energetic electrons. In order to enable HAXPES studies with high lateral resolution, we have set up a dedicated energy-filtered hard x-ray photoemission electron microscope (HAXPEEM) working with electron kinetic energies up to 10 keV. It is based on the NanoESCA design and also preserves the performance of the instrument in the low and medium energy range. In this way, spectromicroscopy can be performed from threshold to hard x-ray photoemission. The high potential of the HAXPEEM approach for the investigation of buried layers and structures has been shown already on a layered and structured SrTiO3 sample. Here, we present results of experiments with test structures to elaborate the imaging and spectroscopic performance of the instrument and show the capabilities of the method to image bulk properties. Additionally, we introduce a method to determine the effective attenuation length of photoelectrons in a direct photoemission experiment. (C) 2014 AIP Publishing LLC.
引用
收藏
页数:11
相关论文
共 26 条
[21]   Resonant scattering and diffraction beamline P09 at PETRA III [J].
Strempfer, J. ;
Francoual, S. ;
Reuther, D. ;
Shukla, D. K. ;
Skaugen, A. ;
Schulte-Schrepping, H. ;
Kracht, T. ;
Franz, H. .
JOURNAL OF SYNCHROTRON RADIATION, 2013, 20 :541-549
[22]   Calculations of electron inelastic mean free paths. IX. Data for 41 elemental solids over the 50 eV to 30 keV range [J].
Tanuma, S. ;
Powell, C. J. ;
Penn, D. R. .
SURFACE AND INTERFACE ANALYSIS, 2011, 43 (03) :689-713
[23]   Hard X-ray photoelectron emission microscopy as tool for studying buried layers [J].
Wakita, T ;
Taniuchi, T ;
Ono, K ;
Suzuki, M ;
Kawamura, N ;
Takagaki, M ;
Miyagawa, H ;
Guo, FZ ;
Nakamura, T ;
Muro, T ;
Akinaga, H ;
Yokoya, T ;
Oshima, M ;
Kobayashi, K .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2006, 45 (3A) :1886-1888
[24]   Probing buried layers by photoelectron spectromicroscopy with hard x-ray excitation [J].
Wiemann, C. ;
Patt, M. ;
Cramm, S. ;
Escher, M. ;
Merkel, M. ;
Gloskovskii, A. ;
Thiess, S. ;
Drube, W. ;
Schneider, C. M. .
APPLIED PHYSICS LETTERS, 2012, 100 (22)
[25]   A New Nanospectroscopy Tool with Synchrotron Radiation: NanoESCA@Elettra* [J].
Wiemann, Carsten ;
Patt, Marten ;
Krug, Ingo P. ;
Weber, Nils B. ;
Escher, Matthias ;
Merkel, Michael ;
Schneider, Claus M. .
E-JOURNAL OF SURFACE SCIENCE AND NANOTECHNOLOGY, 2011, 9 :395-399
[26]  
ZEGENHAGEN J, 2005, NUCL INSTRUM METH A, V547, P1