共 50 条
- [41] Parylene-PDMS bilayer coatings for microelectronic and MEMS packaging ADVANCED ELECTRONIC PACKAGING, 2007, 968 : 181 - +
- [42] A lateral RF MEMS capacitive switch utilizing parylene as dielectric Microsystem Technologies, 2012, 18 : 77 - 85
- [43] Parylene-MEMS technique-based flexible electronics Science China Information Sciences, 2018, 61
- [44] Wafer bonding using microwave heating of parylene for MEMS packaging 54TH ELECTRONIC COMPONENTS & TECHNOLOGY CONFERENCE, VOLS 1 AND 2, PROCEEDINGS, 2004, : 924 - 930
- [45] An agarose-stabilized BLM: A new method for forming bilayer lipid membranes MATERIALS SCIENCE & ENGINEERING C-BIOMIMETIC AND SUPRAMOLECULAR SYSTEMS, 1996, 4 (01): : 35 - 38
- [49] Development of conformal PDMS and parylene coatings for micrelectronics and MEMS packaging ELECTRONIC AND PHOTONIC PACKAGING, INTEGRATION AND PACKAGING OF MICRO/NANO/ELECTRONIC SYSTEMS, 2005, : 279 - 283
- [50] Parylene MEMS patency sensor for assessment of hydrocephalus shunt obstruction Biomedical Microdevices, 2016, 18