Optimization of metallic microheaters for high-speed reconfigurable silicon photonics

被引：101

作者：

Atabaki, A. H. ^{[1
]}

Hosseini, E. Shah ^{[1
]}

Eftekhar, A. A. ^{[1
]}

Yegnanarayanan, S. ^{[1
]}

Adibi, A. ^{[1
]}

机构：

[1] Georgia Inst Technol, Sch Elect & Comp Engn, Atlanta, GA 30332 USA

来源：

OPTICS EXPRESS | 2010年 / 18卷 / 17期

关键词：

WAVE-GUIDE; DISPERSION COMPENSATOR; THERMOOPTICAL SWITCH; MICRORING RESONATORS; TECHNOLOGY; NETWORKS; FILMS;

D O I：

10.1364/OE.18.018312

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

The strong thermooptic effect in silicon enables low-power and low-loss reconfiguration of large-scale silicon photonics. Thermal reconfiguration through the integration of metallic microheaters has been one of the more widely used reconfiguration techniques in silicon photonics. In this paper, structural and material optimizations are carried out through heat transport modeling to improve the reconfiguration speed of such devices, and the results are experimentally verified. Around 4 mu s reconfiguration time are shown for the optimized structures. Moreover, sub-microsecond reconfiguration time is experimentally demonstrated through the pulsed excitation of the microheaters. The limitation of this pulsed excitation scheme is also discussed through an accurate system-level model developed for the microheater response. (C) 2010 Optical Society of America

引用

页码：18312 / 18323

页数：12

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