Improvement of infrared detection using Ge quantum dots multilayer structure

被引:31
作者
Kolahdouz, M. [1 ]
Farniya, A. Afshar [1 ]
Di Benedetto, L. [1 ]
Radamson, H. H. [1 ]
机构
[1] KTH Royal Inst Technol, Sch Informat & Commun Technol, S-16640 Kista, Sweden
关键词
Ge-Si alloys; infrared detectors; interface roughness; internal stresses; noise; semiconductor epitaxial layers; semiconductor quantum dots; semiconductor quantum wells; thermal resistance; thermistors;
D O I
10.1063/1.3441120
中图分类号
O59 [应用物理学];
学科分类号
摘要
Monocrystalline SiGe/Si multiquantum dot and well structures have been manufactured/compared as thermistor materials for infrared detection. The performance of the devices (both the thermal and electrical) has been very sensitive to the quality of the epitaxial layers which is evaluated by the interfacial roughness and strain amount. This study demonstrates that the devices containing quantum dots have higher thermal coefficient resistance 3.4%/K with a noise constant (K(1/f)) value of 2x10(-9). (C) 2010 American Institute of Physics. [doi:10.1063/1.3441120]
引用
收藏
页数:3
相关论文
共 9 条
  • [1] Andersson J., 2001, U.S. Patent, Patent No. [6 292 089 B1, 6292089]
  • [2] Self-assembled Si and SiGe nanostructures:: New growth concepts and structural analysis
    Bauer, G.
    Schaeffler, F.
    [J]. PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2006, 203 (14): : 3496 - 3505
  • [3] Di Benedetto L., 2009, Proceedings of the 39th European Solid-State Device Research Conference. ESSDERC 2009, P101, DOI 10.1109/ESSDERC.2009.5331312
  • [4] 1/F NOISE IS NO SURFACE EFFECT
    HOOGE, FN
    [J]. PHYSICS LETTERS A, 1969, A 29 (03) : 139 - &
  • [5] Preparation of vanadium oxide thin films with high temperature coefficient of resistance by facing targets d.c. reactive sputtering and annealing process
    Lv, Yuqiang
    Hu, Ming
    Wu, Miao
    Liu, Zhigang
    [J]. SURFACE & COATINGS TECHNOLOGY, 2007, 201 (9-11) : 4969 - 4972
  • [6] Fabrication and performance comparison of planar and sandwich structures of micro-bolometers with Ge thermo-sensing layer
    Moreno, M.
    Kosarev, A.
    Torres, A.
    Ambrosio, R.
    [J]. THIN SOLID FILMS, 2007, 515 (19) : 7607 - 7610
  • [7] THEORETICAL CALCULATIONS OF HETEROJUNCTION DISCONTINUITIES IN THE SI/GE SYSTEM
    VAN DE WALLE, CG
    MARTIN, RM
    [J]. PHYSICAL REVIEW B, 1986, 34 (08): : 5621 - 5634
  • [8] VIEIDER V, 2007, P SPIE, V6542
  • [9] SiGe quantum well thermistor materials
    Wissmar, S. G. E.
    Radamsson, H. H.
    Yamamoto, Y.
    Tillack, B.
    Vieider, C.
    Andersson, J. Y.
    [J]. THIN SOLID FILMS, 2008, 517 (01) : 337 - 339