Concept, design and capability analysis of the new Deflectometric Flatness Reference at PTB

被引：20

作者：

Schulz, M. ^{[1
]}

Ehret, G. ^{[1
]}

Stavridis, M. ^{[2
]}

Elster, C. ^{[2
]}

机构：

[1] PTB, D-38116 Braunschweig, Germany

[2] PTB, D-10587 Berlin, Germany

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT | 2010年 / 616卷 / 2-3期

关键词：

Deflectometry; Flatness measurement; Nanometrology; Simulation; ESAD;

D O I：

10.1016/j.nima.2009.10.108

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

At PTB, a new setup for the highly accurate topography measurement of nearly flat optical surfaces is now under construction. The so-called Deflectometric Flatness Reference (DFR) is designed to measure in the direct deflectometric mode by applying an autocollimator and a scanning pentaprism, and in the difference deflectometric mode corresponding to the Extended Shear Angle Difference (ESAD) principle invented by PTB. With the new DFR instrument, horizontally as well as vertically orientated specimens with dimensions of up to 1 m and a mass of up to 120 kg will be measurable. The design of the new instrument is supported by employing a comprehensive simulation environment developed for dimensional measuring machines. The mechanical and optical concept is illustrated together with the current design of the DFR setup. Results from the simulations are presented to derive requirements for tolerated mechanical stage deviations and alignment accuracies. (C) 2009 Elsevier B.V. All rights reserved.

引用

页码：134 / 139

页数：6

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