Three dimensional holographic microfabrication by single femtosecond laser pulse

We have developed a new 3D microfabrication method, which uses only a single femtosecond laser pulse. The phase distribution of the pulse is controlled by a computer generated hologram, and a complicated 3D microstructure is fabricated simultaneously. In this paper, two sample 3D microstructures are shown: the first one consists of 24 dot elements of same shape, and the second one has two different shapes, namely 22 dot elements and one line element. The light irradiance distribution control is the key of this method, and indispensable especially for fabricating elements of different shapes simultaneously.