Laser-Direct Patterning of Nanostructured Metal Thin Films

被引：9

作者：

Shin, Hyunkwon ^{[1
]}

Lee, Hyeongjae ^{[1
]}

Yoo, Hyeonggeun ^{[1
]}

Lim, Ki-Soo ^{[2
]}

Lee, Myeongkyu ^{[1
]}

机构：

[1] Yonsei Univ, Dept Mat Sci & Engn, Seoul 120749, South Korea

[2] Chungbuk Univ, Dept Phys, Cheongju 361763, South Korea

来源：

KOREAN JOURNAL OF METALS AND MATERIALS | 2010年 / 48卷 / 02期

关键词：

thin films; metals; nanostructured materials; scanning electron microscopy; microstructurds; FIELD-EFFECT TRANSISTORS; SILICON-WAFERS; DEPOSITION; PARTICLES; SURFACES; REMOVAL;

D O I：

10.3365/KJMM.2010.48.02.163

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We here describe the laser-direct patterning of nanostructured metal thin films. This method involves light-matter interaction in which a pulsed laser beam impinging on the film generates a thermo-elastic force that plays a role to detach the film from the substrate or underlying layers. A moderate cohesion of the nanostructured film enables localized desorption of the material upon irradiation by a spatially-modulated laser beam, giving good fidelity with the transfered pattern. This photoresist-free process provides a simple high-resolution scheme for patterning metal thin films.

引用

页码：163 / 168

页数：6

共 17 条

[1] Modeling of laser cleaning of metallic particulate contaminants from silicon surfaces [J].

Arronte, M ;

Neves, P ;

Vilar, R .

JOURNAL OF APPLIED PHYSICS, 2002, 92 (12) :6973-6982

[2] METAL-DEPOSITION AT 532-NM USING A LASER TRANSFER TECHNIQUE [J].

BOHANDY, J ;

KIM, BF ;

ADRIAN, FJ ;

JETTE, AN .

JOURNAL OF APPLIED PHYSICS, 1988, 63 (04) :1158-1162

[3] METAL-DEPOSITION FROM A SUPPORTED METAL-FILM USING AN EXCIMER LASER [J].

BOHANDY, J ;

KIM, BF ;

ADRIAN, FJ .

JOURNAL OF APPLIED PHYSICS, 1986, 60 (04) :1538-1539

[4] Inkjet printing for materials and devices [J].

Calvert, P .

CHEMISTRY OF MATERIALS, 2001, 13 (10) :3299-3305

[5] Laser removal of copper particles from silicon wafers using UV, visible and IR radiation [J].

Lee, JM ;

Curran, C ;

Watkins, KG .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2001, 73 (02) :219-224

[6] Thin film deposition, patterning, and printing in organic thin film transistors [J].

Ling, MM ;

Bao, ZN .

CHEMISTRY OF MATERIALS, 2004, 16 (23) :4824-4840

[7] Electrical contacts to molecular layers by nanotransfer printing [J].

Loo, YL ;

Lang, DV ;

Rogers, JA ;

Hsu, JWP .

NANO LETTERS, 2003, 3 (07) :913-917

[8] Interfacial chemistries for nanoscale transfer printing [J].

Loo, YL ;

Willett, RL ;

Baldwin, KW ;

Rogers, JA .

JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 2002, 124 (26) :7654-7655

[9] High-resolution electrohydrodynamic jet printing [J].

Park, Jang-Ung ;

Hardy, Matt ;

Kang, Seong Jun ;

Barton, Kira ;

Adair, Kurt ;

Mukhopadhyay, Deep Kishore ;

Lee, Chang Young ;

Strano, Michael S. ;

Alleyne, Andrew G. ;

Georgiadis, John G. ;

Ferreira, Placid M. ;

Rogers, John A. .

NATURE MATERIALS, 2007, 6 (10) :782-789

[10] All-inorganic field effect transistors fabricated by printing [J].

Ridley, BA ;

Nivi, B ;

Jacobson, JM .

SCIENCE, 1999, 286 (5440) :746-749

← 1 2 →