A comprehensive study on the self-lubrication mechanisms of SU-8 composites

被引：6

作者：

Saravanan, Prabakaran ^{[1
]}

Sinha, Sujeet K. ^{[2
]}

Jayaraman, Sundaramurthy ^{[4
]}

Duong, Hai M. ^{[3
]}

机构：

[1] Kyushu Univ, Int Inst Carbon Neutral Energy Res WPI I2CNER, Fukuoka 8190395, Japan

[2] Indian Inst Technol Delhi, Dept Mech Engn, New Delhi 110016, India

[3] Natl Univ Singapore, Dept Mech Engn, Singapore 117576, Singapore

[4] Ngee Ann Polytech, Ctr Innovat, Environm & Water Technol, Singapore 599489, Singapore

来源：

TRIBOLOGY INTERNATIONAL | 2016年 / 95卷

关键词：

Composite; Boundary lubrication; PFPE; Self-lubrication; MICROELECTROMECHANICAL SYSTEMS; TRIBOLOGICAL BEHAVIOR; MEMS; COATINGS; SURFACE; PARTS;

D O I：

10.1016/j.triboint.2015.11.044

中图分类号：

TH [机械、仪表工业];

学科分类号：

0802 ;

摘要：

Poor tribological properties of SU-8, a promising MEMS structural material, have been recently addressed by developing a perflouropolyether (Z-dol) lubricant droplet-filled SU-8 composite. The composite shows wear durability four orders of magnitude greater than that of SU-8. The chemical reaction between the SU-8 and PFPE molecules and the physical self-lubrication mechanism were found responsible for this dramatic improvement. In this work, the self-lubrication mechanism at the ball-composite interface of SU-8+5 wt% Z-dol composite was further investigated by varying sliding speed. Effects of normal load on the tribological responses of SU-8+5 wt% Z-dol composite was also investigated independently and various possible wear mechanisms are proposed. (C) 2015 Elsevier Ltd. All rights reserved.

引用

页码：391 / 405

页数：15

共 32 条

[21]

Prabakaran S., 2013, TRIBOL LETT, V49, P169

[22] The Role of Functional End Groups of Perfluoropolyether (Z-dol and Z-03) Lubricants in Augmenting the Tribology of SU-8 Composites [J].

Prabakaran, Saravanan ;

Jayaraman, Sundaramurthy ;

Duong Hai Minh ;

Sinha, Sujeet K. .

TRIBOLOGY LETTERS, 2014, 56 (03) :423-434

[23] A new SU-8 process to integrate buried waveguides and sealed microchannels for a Lab-on-a-Chip [J].

Ruano-López, JM ;

Aguirregabiria, M ;

Tijero, M ;

Arroyo, MT ;

Elizalde, J ;

Berganzo, J ;

Aranburu, I ;

Blanco, FJ ;

Mayora, K .

SENSORS AND ACTUATORS B-CHEMICAL, 2006, 114 (01) :542-551

[24] An in-situ heating effect study on tribological behavior of SU-8+PFPE composite [J].

Saravanan, Prabakaran ;

Satyanarayana, Nalam ;

Minh, Duong Hai ;

Sinha, Sujeet K. .

WEAR, 2013, 307 (1-2) :182-189

[25] Tribology of PFPE overcoated self-assembled monolayers deposited on Si surface [J].

Satyanarayana, N ;

Sinha, SK .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2005, 38 (18) :3512-3522

[26] Tribo-functionalizing Si and SU8 materials by surface modification for application in MEMS/NEMS actuator-based devices [J].

Singh, R. A. ;

Satyanarayana, N. ;

Kustandi, T. S. ;

Sinha, S. K. .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2011, 44 (01)

[27] Surface chemical modification for exceptional wear life of MEMS materials [J].

Singh, R. Arvind ;

Satyanarayana, N. ;

Sinha, Sujeet Kumar .

AIP ADVANCES, 2011, 1 (04)

[28]

Sophie C, 2012, TRIBOL LETT, V48, P237

[29]

Spikes H.A., 1997, LUBR SCI, V9, P221, DOI [10.1002/ls.3010090302, DOI 10.1002/LS.3010090302]

[30] SOLID LUBRICATING FLUORINE-CONTAINING POLYMER FILM SYNTHESIZED BY PERFLUOROPOLYETHER SPUTTERING [J].

SUGIMOTO, I ;

MIYAKE, S .

THIN SOLID FILMS, 1988, 158 (01) :51-60

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