Fast MTF measurement of CMOS imagers at the chip level using ISO 12233 slanted-edge methodology

被引：11

作者：

Estribeau, M ^{[1
]}

Magnan, P ^{[1
]}

机构：

[1] SUPAERO, Integrated Image Sensors Lab, F-31400 Toulouse, France

来源：

SENSORS, SYSTEMS, AND NEXT-GENERATION SATELLITES VIII | 2004年 / 5570卷

关键词：

CMOS Image Sensors; Modulation Transfer Function; Slanted-Edge method;

D O I：

10.1117/12.565503

中图分类号：

V [航空、航天];

学科分类号：

08 ; 0825 ;

摘要：

MTF measurement methods for imaging devices usually require the use of an optical system to project the image of the object onto the detector. So, MTF results quality strongly depends on the accuracy of the optical adjustments (alignments, focusing...). Dedicated edge patterns have been implemented at the chip level on a CMOS imager. One of them emulates the tar-et used in the ISO 12233 slanted-edge technique and the others one are inspired by the knife-edge method. This allows to get the MTF data without optical focusing. In order to validate the results, comparisons have been made between MTF measurements using these patterns and results obtained through direct measurements with the transmissive slanted-edge target and sine target.

引用

页码：557 / 567

页数：11