A comprehensive study on RF MEMS switch

被引：60
作者：
Jaafar, H. [1 ]
Beh, K. S. [1 ]
Yunus, N. A. M. [1 ]
Hasan, W. Z. W. [1 ]
Shafie, S. [1 ]
Sidek, O. [2 ]
机构：
[1] Univ Putra Malaysia, Dept Elect & Elect Engn, Fac Engn, Serdang 43400, Selangor, Malaysia
[2] Univ Sains Malaysia, Fac Elect & Elect Engn, George Town, Malaysia
来源：
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS | 2014年 / 20卷 / 12期
关键词：
DESIGN; PERFORMANCE; FABRICATION;
D O I：
10.1007/s00542-014-2276-7
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper emphasis on state-of-the-art of the earlier until the current trend and demand, principles, design considerations, key performance and fabrication technology of RF MEMS switch devices developed over the past few years. RF MEMS switch performance and features such as actuation voltage, insertion loss, isolation and ease with cost of fabrication and applications are compared and discussed.
引用
收藏
页码：2109 / 2121
页数：13
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