Photonic-crystal lasers on silicon for chip-scale optical interconnects

被引:1
|
作者
Takeda, Koji [1 ,3 ]
Fujii, Takuro [1 ,3 ]
Shinya, Akihiko [2 ,3 ]
Kuramochi, Eiichi [2 ,3 ]
Notomi, Masaya [2 ,3 ]
Hasebe, Koichi [1 ,3 ]
Kakitsuka, Takaaki [1 ,3 ]
Matsuo, Shinji [1 ,3 ]
机构
[1] NTT Corp, Device Technol Labs, 3-1 Morinosato Wakamiya, Atsugi, Kanagawa 2430198, Japan
[2] NTT Corp, Basic Res Labs, 3-1 Morinosato Wakamiya, Atsugi, Kanagawa 2430198, Japan
[3] NTT Corp, Nanophoton Ctr, 3-1 Morinosato Wakamiya, Atsugi, Kanagawa 2430198, Japan
来源
关键词
Photonic-crystal lasers; on-Si lasers; optical interconnects; wafer bonding; buried heterostructure; VCSELS;
D O I
10.1117/12.2208312
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Optical interconnects are expected to reduce the power consumption of ICT instruments. To realize chip-to-chip or chip scale optical interconnects, it is essential to fabricate semiconductor lasers with a smaller energy cost. In this context, we are developing lambda-scale embedded active-region photonic-crystal (LEAP) lasers as light sources for chip-scale optical interconnects. We demonstrated the first continuous-wave (CW) operation of LEAP lasers in 2012 and reported a record low threshold current and energy cost of 4.8 mu A and 4.4 ET/bit at 10 Gbit/s in 2013. We have also integrated photonic crystal photodetectors on the same InP chip and demonstrated waveform transfer along 500-mu m-long waveguides. Although LEAP lasers exhibit excellent performance, they have to be integrated on Si wafers for use as light sources for chip-scale optical interconnects. In this paper, we give a brief overview of our LEAP lasers on InP and report our recent progress in fabricating them on Si. We bonded the InP wafers with quantum-well gain layers directly on thermally oxidized Si wafers and performed all process steps on the Si wafer, including high-temperature regrowth. After this process modification, we again achieved CW operation and obtained a threshold current of 57 mu A with a maximum output power of more than 3.5 mu W at the output waveguides. An output light was successfully guided through 500 x 250-nm InP waveguides.
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页数:6
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