Enhanced diffusion upon amorphous-to-nanocrystalline phase transition in Mo/B4C/Si layered systems

被引：16

作者：

de Rooij-Lohmann, V. I. T. A. ^{[1
]}

Yakshin, A. E. ^{[1
]}

van de Kruijs, R. W. E. ^{[1
]}

Zoethout, E. ^{[1
]}

Kleyn, A. W. ^{[1
]}

Keim, E. G. ^{[2
]}

Gorgoi, M. ^{[3
]}

Schaefers, F. ^{[3
]}

Brongersma, H. H. ^{[4
]}

Bijkerk, F. ^{[1
,2
]}

机构：

[1] FOM Inst Plasma Phys Rijnhuizen, NL-3430 BE Nieuwegein, Netherlands

[2] Univ Twente, MESA Inst Nanotechnol, NL-7500 AE Enschede, Netherlands

[3] Helmholtz Zentrum Berlin Mat & Energie GmbH, BESSY 2, D-12489 Berlin, Germany

[4] Tascon GmbH, D-48149 Munster, Germany

来源：

JOURNAL OF APPLIED PHYSICS | 2010年 / 108卷 / 01期

关键词：

MOLYBDENUM; MULTILAYERS; INTERFACE; SILICIDE; CARBIDE; FILMS;

D O I：

10.1063/1.3460107

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The effect of an amorphous-to-nanocrystalline phase transition on the diffusion across an interface layer of subnanometer thickness has been investigated in real-time. The diffusion in the Mo/B4C/Si thin film structure studied was found to instantaneously enhance by an order of magnitude upon the formation of nanocrystals inducing the atomic-scale onset of grain boundary diffusion. (C) 2010 American Institute of Physics. [doi:10.1063/1.3460107]

引用

页数：5

共 21 条

[1] Thermal stability of Mo/Si multilayers with boron carbide interlayers
Böttger, T
Meyer, DC
Paufler, P
Braun, S
Moss, M
Mai, H
Beyer, E
[J]. THIN SOLID FILMS, 2003, 444 (1-2) : 165 - 173
[2] XPS STUDY OF THE ADHERENCE OF REFRACTORY CARBIDE, SILICIDE, AND BORIDE RF-SPUTTERED WEAR-RESISTANT COATINGS
BRAINARD, WA
WHEELER, DR
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1978, 15 (06): : 1800 - 1805
[3] Surface composition analysis by low-energy ion scattering
Brongersma, H. H.
Draxler, M.
de Ridder, M.
Bauer, P.
[J]. SURFACE SCIENCE REPORTS, 2007, 62 (03) : 63 - 109
[4] The effect of Mo crystallinity on diffusion through the Si-on-Mo interface in EUV multilayer systems
Bruijn, S.
van de Kruijs, R. W. E.
Yakshin, A. E.
Bijkerk, F.
[J]. DIFFUSION IN SOLIDS AND LIQUIDS IV, 2009, 283-286 : 657 - 661
[5] Diffusion and interaction studied nondestructively and in real-time with depth-resolved low energy ion spectroscopy
de Rooij-Lohmann, V. I. T. A.
Kleyn, A. W.
Bijkerk, F.
Brongersma, H. H.
Yakshin, A. E.
[J]. APPLIED PHYSICS LETTERS, 2009, 94 (06)
[6] PHASE FORMATION DURING REACTIVE MOLYBDENUM-SILICIDE FORMATION
DOLAND, CM
NEMANICH, RJ
[J]. JOURNAL OF MATERIALS RESEARCH, 1990, 5 (12) : 2854 - 2864
[7] Velocity scaling of ion neutralization in low energy ion scattering
Draxler, M
Gruber, R
Brongersma, HH
Bauer, P
[J]. PHYSICAL REVIEW LETTERS, 2002, 89 (26) : 1 - 263201
[8] The high kinetic energy photoelectron spectroscopy facility at BESSY progress and first results
Gorgoi, M.
Svensson, S.
Schaefers, F.
Ohrwall, G.
Mertin, M.
Bressler, P.
Karis, O.
Siegbahn, H.
Sandell, A.
Rensmo, H.
Doherty, W.
Jung, C.
Braun, W.
Eberhardt, W.
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2009, 601 (1-2) : 48 - 53
[9] Subnanometer-scale measurements of the interaction of ultrafast soft X-ray free-electron-laser pulses with matter
Hau-Riege, Stefan P.
Chapman, Henry N.
Krzywinski, Jacek
Sobierajski, Ryszard
Bajt, Sasa
London, Richard A.
Bergh, Magnus
Caleman, Carl
Nietubyc, Robert
Juha, Libor
Kuba, Jaroslav
Spiller, Eberhard
Baker, Sherry
Bionta, Richard
Tinten, K. Sokolowski
Stojanovic, Nikola
Kjornrattanawanich, Benjawan
Gullikson, Eric
Ploenjes, Elke
Toleikis, Sven
Tschentscher, Thomas
[J]. PHYSICAL REVIEW LETTERS, 2007, 98 (14)
[10] INTERFACIAL REACTIONS ON ANNEALING MOLYBDENUM-SILICON MULTILAYERS
HOLLOWAY, K
DO, KB
SINCLAIR, R
[J]. JOURNAL OF APPLIED PHYSICS, 1989, 65 (02) : 474 - 480

← 1 2 3 →