A review of analysis methods for sub-micron indentation testing

被引：274

作者：

Fischer-Cripps, AC ^{[1
]}

机构：

[1] CSIRO, Div Telecommun & Ind Phys, Lindfield, NSW 2070, Australia

来源：

VACUUM | 2000年 / 58卷 / 04期

关键词：

indentation testing; hardness; nanoindentation; thin film testing;

D O I：

10.1016/S0042-207X(00)00377-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The present work is concerned with the methods of analysis of data obtained from sub-micron indentation testing such as that performed on thin film systems. The underlying theory behind the extraction of elastic modulus and hardness from the unloading load-displacement data obtained with spherical indenter and Berkovich pyramidal indenters is given in some detail. A description of the corrections to the measured data is provided and limitations of the analysis highlighted. Crown Copyright (C) 2000 Published by Elsevier Science Ltd. All rights reserved.

引用

页码：569 / 585

页数：17

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