A review of analysis methods for sub-micron indentation testing

被引：274
作者：
Fischer-Cripps, AC [1 ]
机构：
[1] CSIRO, Div Telecommun & Ind Phys, Lindfield, NSW 2070, Australia
来源：
VACUUM | 2000年 / 58卷 / 04期
关键词：
indentation testing; hardness; nanoindentation; thin film testing;
D O I：
10.1016/S0042-207X(00)00377-8
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The present work is concerned with the methods of analysis of data obtained from sub-micron indentation testing such as that performed on thin film systems. The underlying theory behind the extraction of elastic modulus and hardness from the unloading load-displacement data obtained with spherical indenter and Berkovich pyramidal indenters is given in some detail. A description of the corrections to the measured data is provided and limitations of the analysis highlighted. Crown Copyright (C) 2000 Published by Elsevier Science Ltd. All rights reserved.
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页码：569 / 585
页数：17
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