Measuring in-plane and out-of-plane coupled motions of microstructures by stroboscopic microscopic interferometry

被引：2

作者：

Hu, Xiaodong ^{[1
]}

Hu, Chunguang ^{[1
]}

Chen, Zhi ^{[1
]}

Guo, Tong ^{[1
]}

Hu, Xiaotang ^{[1
]}

机构：

[1] Tianjin Univ, State Key Lab Precis Measuring Technol & Instrume, Tianjin 300072, Peoples R China

来源：

OPTICS AND LASER TECHNOLOGY | 2007年 / 39卷 / 06期

基金：

中国国家自然科学基金;

关键词：

microscopic interferometry; stroboscopic illumination; coupled motions;

D O I：

10.1016/j.optlastec.2006.08.013

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A stroboscopic Mirau microscopic interferometer system for measuring in-plane and out-of-plane periodic motions of microstructures is demonstrated. One full cycle of a periodic motion is divided into a number of motion phases. One sequence of interferograms with different phase shifting steps is collected at every motion phase by using stroboscopic imaging. A bright-field image can be extracted from one sequence of interferograms with the same motion phase. In-plane displacements are measured by applying an image matching method to all bright-field images, followed by a compensation for the relative positions of interferograms at the different motion phases, before calculating the phase distribution related to out-of-plane deformation. We demonstrate its capability for measuring a combination of out-of-plane deformation and in-plane displacement in a microresonator. (C) 2006 Elsevier Ltd. All rights reserved.

引用

页码：1176 / 1182

页数：7