Optical and electrical properties of TiO2/Pt/TiO2 nanolaminate structures

被引:2
作者
Dikov, Ch [1 ]
Vitanov, P. [1 ]
Ivanova, T. [1 ]
Stavrov, V. [2 ]
Tomerov, E. [2 ]
Stavreva, G. [2 ]
Bineva, I. [3 ]
机构
[1] Bulgarian Acad Sci, Cent Lab Solar Energy & New Energy Sources, 72 Tzarigradsko Chaussee, BU-1784 Sofia, Bulgaria
[2] AMG Technol Ltd, Botevgrad 2140, Bulgaria
[3] Bulgarian Acad Sci, G Nadjakov Inst Solid State Phys, 72 Tzarigradsko Chaussee, BU-1784 Sofia, Bulgaria
来源
20TH INTERNATIONAL SUMMER SCHOOL ON VACUUM, ELECTRON AND ION TECHNOLOGIES, 2017 | 2018年 / 992卷
关键词
D O I
10.1088/1742-6596/992/1/012033
中图分类号
O59 [应用物理学];
学科分类号
摘要
We report the results of a study on the optical and electrical properties of nanolaminate TiO2/Pt/TiO2 structures fabricated using RF magnetron sputtering. The effect was investigated of the discontinuous Pt layer on the optical transmittance, electrical conductivity and morphology of the TiO2/Pt/TiO2 structure. On the basis of the theory of electronic tunneling transport between metal granulates in a dielectric matrix, a new technological approach is proposed of preparing high-sensitivity strain sensors based on resistors with a nanolaminate structure containing Pt granulates.
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页数:5
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