共 36 条
[4]
*CFD RES CORP, 2002, CFD ACE U US MAN VER
[5]
Cha SW, 2003, FUEL CELL SCIENCE, ENGINEERING AND TECHNOLOGY, P143
[6]
CHA SW, 2003, UNPUB P INT C SOL ST
[8]
High-aspect-ratio, ultrathick, negative-tone near-UV photoresist for MEMS applications
[J].
MEMS 97, PROCEEDINGS - IEEE THE TENTH ANNUAL INTERNATIONAL WORKSHOP ON MICRO ELECTRO MECHANICAL SYSTEMS: AN INVESTIGATION OF MICRO STRUCTURES, SENSORS, ACTUATORS, MACHINES AND ROBOTS,
1997,
:518-522