PROFILOMETRY BY POLARIZING PHASE-SHIFTING INTERFEROMETRY

被引：0

作者：

Garoi, F. ^{[1
]}

机构：

[1] Natl Inst Laser Plasma & Radiat Phys, Laser Dept, Atomistilor 409,POB MG-36, Magurele 077125, Ilfov, Romania

来源：

ROMANIAN JOURNAL OF PHYSICS | 2019年 / 64卷 / 7-8期

关键词：

interferometry; phase-shifting; polarization; profilometry; geometric phase; LIGHT; MODULATION;

D O I：

暂无

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

A polarizing phase-shifting interferometer is introduced and its application to non-contact profilometry described. Given the nature of the polarizing phase-shifter, it is shown that phase steps are applied without a change in the optical path difference (and translation of the mirror) by manipulation of the geometric (Pancharatnam) phase. Compared with a commercial optical non-contact profilometer (working by white light interferometry principle) the experimental setup gives similar results, when measuring the profile of a thin film sample.

引用

页数：12

共 20 条

[11]

Nyakang O., 2013, INT J OPTOELECTRON E, V3, P13

[12]

Pancharatnam S, 1956, Proceedings of the Indian Academy of Sciences-Section A, V44, P247, DOI DOI 10.1007/BF03046050

[13]

Petris A, 2015, ROM REP PHYS, V67, P1373

[14] Phase-visibility modulating interferometry by binary non-quadrature amplitude modulation with neutral density filters [J].

Rivera-Ortega, Uriel ;

Meneses-Fabian, Cruz ;

Rodriguez-Zurita, Gustavo ;

Robledo-Sanchez, Carlos .

OPTICS AND LASERS IN ENGINEERING, 2014, 55 :226-231

[15]

Suriyasirikun S., 2014, Advanced Materials Research, V979, P463, DOI 10.4028/www.scientific.net/AMR.979.463

[16] Phase shifting interferometry using a spatial light modulator to measure optical thin films [J].

Villalobos-Mendoza, Brenda ;

Granados-Agustin, Fermin S. ;

Aguirre-Aguirre, Daniel ;

Cornejo-Rodriguez, Alejandro .

APPLIED OPTICS, 2015, 54 (26) :7997-8003

[17] Computerized interferometric surface measurements [J].

Wyant, James C. .

APPLIED OPTICS, 2013, 52 (01) :1-8

[18] Stair phase-coding fringe plus phase-shifting used in 3D measuring profilometry [J].

Zeng, Zhuohuan ;

Li, Biao ;

Fu, Yanjun ;

Chai, Minggang .

JOURNAL OF THE EUROPEAN OPTICAL SOCIETY-RAPID PUBLICATIONS, 2016, 12

[19] Birefringence measurement by four-step phase-shifting method on triple-polarizer plane polariscope [J].

Zhang, Xusheng ;

He, Chuan ;

Wang, Haoyu .

OPTICAL ENGINEERING, 2013, 52 (04)

[20] An improved stair phase encoding method for absolute phase retrieval [J].

Zhou, Canlin ;

Liu, Tongchuan ;

Si, Shuchun ;

Xu, Jianqiang ;

Liu, Yepeng ;

Lei, Zhenkun .

OPTICS AND LASERS IN ENGINEERING, 2015, 66 :269-278

← 1 2 →