PROFILOMETRY BY POLARIZING PHASE-SHIFTING INTERFEROMETRY

被引：0

作者：

Garoi, F. ^{[1
]}

机构：

[1] Natl Inst Laser Plasma & Radiat Phys, Laser Dept, Atomistilor 409,POB MG-36, Magurele 077125, Ilfov, Romania

来源：

ROMANIAN JOURNAL OF PHYSICS | 2019年 / 64卷 / 7-8期

关键词：

interferometry; phase-shifting; polarization; profilometry; geometric phase; LIGHT; MODULATION;

D O I：

暂无

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

A polarizing phase-shifting interferometer is introduced and its application to non-contact profilometry described. Given the nature of the polarizing phase-shifter, it is shown that phase steps are applied without a change in the optical path difference (and translation of the mirror) by manipulation of the geometric (Pancharatnam) phase. Compared with a commercial optical non-contact profilometer (working by white light interferometry principle) the experimental setup gives similar results, when measuring the profile of a thin film sample.

引用

页数：12

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