Multilayer Silicon Nitride-on-Silicon Integrated Photonic Platforms

被引：0
|
作者：
Poon, Joyce K. S. [1 ]
Sacher, Wesley D. [1 ]
Huang, Ying [2 ]
Lo, Guo-Qiang [2 ]
机构：
[1] Univ Toronto, Dept Elect & Comp Engn, 10 Kings Coll Rd, Toronto, ON M5S 3G4, Canada
[2] ASTAR, Inst Microelect, Singapore 117685, Singapore
来源：
2015 IEEE COMPOUND SEMICONDUCTOR INTEGRATED CIRCUIT SYMPOSIUM (CSICS) | 2015年
关键词：
Integrated optics; photonic integrated circuits; POLARIZATION ROTATOR-SPLITTERS; GRATING COUPLER; WIDE BANDWIDTH; CHIP;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Progress in multilayer silicon nitride on silicon integrated photonic platforms will be presented. Such platforms enable improved passive photonic components in the telecommunication wavelength bands integrated with active silicon (and potentially hybrid silicon) components, while remaining compatible with wafer-scale silicon foundry fabrication and packaging processes. The reduced losses, scattering, thermo-optic coefficient, nonlinearity of moderate refractive index contrast silicon nitride waveguides compared to silicon waveguides motivate the development of such multilayer photonic platforms.
引用
收藏
页数：4
相关论文
共 50 条
  • [31] Experimental investigation of silicon and silicon nitride platforms for phase-change photonic in-memory computing
    Li, Xuan
    Youngblood, Nathan
    Cheng, Zengguang
    Carrillo, Santiago Garcia-Cuevas
    Gemo, Emanuele
    Pernice, Wolfram H. P.
    Wright, C. David
    Bhaskaran, Harish
    OPTICA, 2020, 7 (03): : 218 - 225
  • [32] Silicon-Nitride Photonic Integrated Circuits for Atomic Systems
    Gallacher, Kevin
    Di Gaetano, Eugenio
    Dyer, Sean
    Kelliehor, Brendan
    McGilligan, James P.
    Sinclair, Martin
    Hawley, Ugne
    Arnold, Aidan S.
    Griffin, Paul F.
    Sorel, Marc
    Riis, Erling
    Paul, Douglas J.
    2023 IEEE PHOTONICS SOCIETY SUMMER TOPICALS MEETING SERIES, SUM, 2023,
  • [33] Silicon nitride integrated photonic platform at 780 nm wavelength
    Palmer, Sonya
    Boes, Andreas
    Ren, Guanghui
    Nguyen, Thach
    Mitchell, Arnan
    2020 CONFERENCE ON LASERS AND ELECTRO-OPTICS PACIFIC RIM (CLEO-PR), 2020,
  • [34] Near ultraviolet photonic integrated lasers based on silicon nitride
    Siddharth, Anat
    Wunderer, Thomas
    Lihachev, Grigory
    Voloshin, Andrey S.
    Haller, Camille
    Wang, Rui Ning
    Teepe, Mark
    Yang, Zhihong
    Liu, Junqiu
    Riemensberger, Johann
    Grandjean, Nicolas
    Johnson, Noble
    Kippenberg, Tobias J.
    APL PHOTONICS, 2022, 7 (04)
  • [35] Silicon nitride stoichiometry tuning for visible photonic integrated components
    Blasco, M.
    Dacunha, S.
    Dominguez, C.
    Faneca, J.
    APPLIED PHYSICS LETTERS, 2024, 124 (22)
  • [36] MULTILAYER EBC FOR SILICON NITRIDE
    Lewinsohn, C. A.
    Zhao, Q.
    Nair, B.
    ADVANCED CERAMIC COATINGS AND INTERFACES, 2007, 27 (03): : 181 - 187
  • [37] Silicon nitride-on-silicon bi-layer grating couplers designed by a global optimization method
    Mak, Jason C. C.
    Wilmart, Quentin
    Olivier, Segolene
    Menezo, Sylvie
    Poon, Joyce K. S.
    OPTICS EXPRESS, 2018, 26 (10): : 13656 - 13665
  • [38] Multi-layer silicon nitride-on-silicon polarization-independent grating couplers
    Mak, Jason C. C.
    Sacher, Wesley D.
    Ying, Huang
    Luo, Xianshu
    Lo, Patrick Guo-Qiang
    Poon, Joyce K. S.
    OPTICS EXPRESS, 2018, 26 (23): : 30623 - 30633
  • [39] Monolithic integration of laser onto multilayer silicon nitride photonic integrated circuits with high efficiency at telecom wavelength
    Yang, Yisu
    Zhao, Hao
    Ren, Xiaomin
    Huang, Yongqing
    OPTICS EXPRESS, 2021, 29 (18) : 28912 - 28923
  • [40] Low-loss compact multilayer silicon nitride platform for 3D photonic integrated circuits
    Shang, Kuanping
    Pathak, Shibnath
    Guan, Binbin
    Liu, Guangyao
    Yoo, S. J. B.
    OPTICS EXPRESS, 2015, 23 (16): : 21334 - 21342
12345