Ti2AlN thin films synthesized by annealing of (Ti plus Al)/AlN multilayers

被引：27
|
作者：
Cabioch, Thierry [1 ]
Alkazaz, Malaz [1 ]
Beaufort, Marie-France [1 ]
Nicolai, Julien [1 ]
Eyidi, Dominique [1 ]
Eklund, Per [1 ,2 ]
机构：
[1] Univ Poitiers, UPR 3346, Inst Pprime, SP2MI Blvd 3,Teleport 2 BP 30179, F-86962 Futuroscope, France
[2] Linkoping Univ, IFM, Thin Film Phys Div, S-58183 Linkoping, Sweden
来源：
MATERIALS RESEARCH BULLETIN | 2016年 / 80卷
基金：
欧洲研究理事会;
关键词：
Annealing; MAX phases; Thin films; Multilayer; OHMIC CONTACTS; DEGREES-C; CRYSTALLIZATION KINETICS; M(N+1)AX(N) PHASES; SPUTTER-DEPOSITION; MATERIALS SCIENCE; CR2ALC; TI3SIC2; TI; STEM;
D O I：
10.1016/j.materresbull.2016.03.031
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Single-phase Ti2AlN thin films were obtained by annealing in vacuum of (Ti + Al)/AIN multilayers deposited at room temperature by magnetron sputtering onto single-crystalline (0001) 4H-SiC and (0001) Al2O3 substrates. In-situ X-ray diffraction experiments combined with ex-situ cross-sectional transmission electron microscopy observations reveal that interdiffusion processes occur in the multilayer at a temperature of similar to 400 degrees C leading to the formation of a (Ti, Al, N) solid solution, having the hexagonal structure of alpha-Ti, whereas the formation of Ti2AlN occurs at 550-600 degrees C. Highly oriented (0002) Ti2AlN thin films can be obtained after an annealing at 750 degrees C. (C) 2016 Elsevier Ltd. All rights reserved.
引用
收藏
页码：58 / 63
页数：6
相关论文
共 50 条
  • [31] Analysis of microstructure and mechanical properties of alumina composites reinforced with Ti2AlN MAX phases
    Cygan, Tomasz
    Wozniak, Jaroslaw
    Broniszewski, Kamil
    Kulikowski, Krzysztof
    Moszczy, Dorota
    Adamczyk-Cies, Boguslawa
    Kurkowska, Milena
    Olszyna, Andrzej
    INTERNATIONAL JOURNAL OF REFRACTORY METALS & HARD MATERIALS, 2024, 122
  • [32] Ti1-xAlxN or TiN plus AlN: An investigation about Al influence on titanium aluminum nitride thin films structural organization
    Dias, I. L.
    de Oliveira, P. R. A.
    Rezende, R. L.
    Sabino, L. F. S.
    Damasceno, I. Z.
    Stavale, F.
    Tentardini, E. K.
    CERAMICS INTERNATIONAL, 2025, 51 (02) : 1813 - 1820
  • [33] Ion beam assisted deposition of AlN monolithic films and Al/AlN multilayers: a comparative study
    Wang, X
    Kolitsch, A
    Prokert, F
    Moller, W
    SURFACE & COATINGS TECHNOLOGY, 1998, 104 : 334 - 339
  • [34] Production of honeycomb-patterned hybrid Ti2AlN/TiNi films and examination of Mechanical, Tribological, Adhesion and Fatigue properties
    Duran, Semih
    Cicek, Hikmet
    SURFACES AND INTERFACES, 2025, 56
  • [35] Synthesis and characterization of Ti2AlC and Ti2AlN MAX phase coatings manufactured in an industrial-size coater
    Garkas, W.
    Leyens, C.
    Renteria, A. Flores
    THERMEC 2009 SUPPLEMENT: 6TH INTERNATIONAL CONFERENCE ON PROCESSING & MANUFACTURING OF ADVANCED MATERIALS, 2010, 89-91 : 208 - +
  • [36] First-principles investigation on the structures, energies, electronic and defective properties of Ti2AlN surfaces
    Liu, Pei
    Han, Xiuli
    Sun, Dongli
    Wang, Qing
    APPLIED SURFACE SCIENCE, 2018, 433 : 1056 - 1066
  • [37] Influence of the mechanical activation process on the corrosion of Ti2AlN MAX phase obtained by hot pressing
    Salvo, C.
    Guerra, C.
    Maril, M.
    Sancy, M.
    CERAMICS INTERNATIONAL, 2025, 51 (04) : 5425 - 5433
  • [38] A combined experimental and modeling study revealing the anisotropic mechanical response of Ti2AlN MAX phase
    Li, Xiaoqiang
    Malzbender, Juergen
    Yan, Gang
    Gonzalez-Julian, Jesus
    Schwaiger, Ruth
    JOURNAL OF THE EUROPEAN CERAMIC SOCIETY, 2021, 41 (12) : 5872 - 5881
  • [39] Ti2AlN MAX phase as a modifier of cellulose acetate membrane for improving antifouling and permeability properties
    Mehrabani, Seyed Ali Naziri
    Keskin, Basak
    Arefi-Oskoui, Samira
    Koyuncu, Ismail
    Vatanpour, Vahid
    Orooji, Yasin
    Khataee, Alireza
    CARBOHYDRATE POLYMERS, 2022, 298
  • [40] Comparing the role of Zr and Hf atoms on microstructure and mechanical properties optimization of Ti2AlN reinforced Ti48Al 0.5W composites
    Chen, Siyu
    Tan, Yingmei
    Wang, Xuan
    Cao, Feng
    Wang, Liang
    Su, Yanqing
    Guo, Jingjie
    JOURNAL OF ALLOYS AND COMPOUNDS, 2023, 935
12345