Deposition of Ag-based Al-doped ZnO multilayer coatings for the transparent conductive electrodes by electron beam evaporation

被引：76

作者：

Sahu, D. R. ^{[1
]}

Lin, Shin-Yuan ^{[1
]}

Huang, Jow-Lay ^{[1
]}

机构：

[1] Natl Cheng Kung Univ, Dept Mat Sci & Engn, Tainan 701, Taiwan

来源：

SOLAR ENERGY MATERIALS AND SOLAR CELLS | 2007年 / 91卷 / 09期

关键词：

Al-doped ZnO; Ag; TCO; optical and electrical properties;

D O I：

10.1016/j.solmat.2007.02.003

中图分类号：

TE [石油、天然气工业]; TK [能源与动力工程];

学科分类号：

0807 ; 0820 ;

摘要：

Silver-based Al-doped ZnO (AZO) multilayer coatings were prepared on glass by e-beam evaporation techniques. Optimization of the deposition conditions of both AZO and Ag layers were performed for better electrical and optical properties. The properties of the multilayers were affected by the deposition process of both AZO and Ag layers. The best multilayer coatings exhibit low sheet resistance of 5.34 ohm/sq and transmittance of more than 85%. The coatings have satisfactory properties of low resistance and high transmittance for application as transparent conductive electrodes. (C) 2007 Elsevier B.V. All rights reserved.

引用

页码：851 / 855

页数：5

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