Experimental and computational study on the phase stability of Al-containing cubic transition metal nitrides

被引:91
作者
Rovere, Florian [1 ,2 ]
Music, Denis [2 ]
Ershov, Sergey [2 ]
Baben, Moritz to [2 ]
Fuss, Hans-Gerd [3 ]
Mayrhofer, Paul H. [1 ]
Schneider, Jochen M. [2 ]
机构
[1] Univ Leoben, Dept Phys Met & Mat Testing, A-8700 Leoben, Austria
[2] Rhein Westfal TH Aachen, D-52056 Aachen, Germany
[3] CemeCon AG, D-52146 Wurselen, Germany
基金
奥地利科学基金会;
关键词
MAGNETRON SPUTTERING METHOD; AUSTENITIC STAINLESS-STEEL; INITIO MOLECULAR-DYNAMICS; AUGMENTED-WAVE METHOD; N COATINGS; THERMAL-STABILITY; HARD COATINGS; PVD-COATINGS; THIN-FILMS; STRUCTURAL TRANSITIONS;
D O I
10.1088/0022-3727/43/3/035302
中图分类号
O59 [应用物理学];
学科分类号
摘要
The phase stability of Al-containing cubic transition metal (TM) nitrides, where Al substitutes for TM (i.e. TM1-xAlxN), is studied as a function of the TM valence electron concentration (VEC). X-ray diffraction and thermal analyses data of magnetron sputtered Ti1-xAlxN, V1-xAlxN and Cr1-xAlxN films indicate increasing phase stability of cubic TM1-xAlxN at larger Al contents and higher temperatures with increasing TM VEC. These experimental findings can be understood based on first principle investigations of ternary cubic TM1-xAlxN with TM = Sc, Ti, V, Cr, Y, Zr and Nb where the TM VEC and the lattice strain are systematically varied. However, our experimental data indicate that, in addition to the decomposition energetics (cubic TM1-xAlxN -> cubic TMN + hexagonal AlN), future stability models have to include nitrogen release as one of the mechanisms that critically determine the overall phase stability of TM1-xAlxN.
引用
收藏
页数:11
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