Analytical solution of flexural vibration responses on taped atomic force microscope cantilevers

被引：25

作者：

Chang, WJ ^{[1
]}

Chu, SS ^{[1
]}

机构：

[1] Natl Cheng Kung Univ, Dept Mech Engn, Tainan 70101, Taiwan

来源：

PHYSICS LETTERS A | 2003年 / 309卷 / 1-2期

关键词：

AFM cantilever; taped cross-section; flexural vibration;

D O I：

10.1016/S0375-9601(03)00129-4

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

An analytical solution of flexural vibration responses on taped atomic force microscope (AFM) cantilevers has been derived and a closed-form expression obtained. The results coincide with previously published analytical solutions for two special cases that are used with the rectangular AFM cantilever. The analytical solution derived in this Letter, can easily assist in obtaining the resonance frequency at arbitrary dimensions and tip radii. It is useful for the design of the AFM cantilever, including the solid or hollow circular and rectangular cross-section, and can serve to evaluate the accuracy of the approximate or numerical solutions for the AFM cantilever with a complicated cross-section. Furthermore, the solution was confirmed and can also be applied to obtain the resonant frequency of a conical cantilever with an elongated tip which is used for imaging the deep trenches and complex structures. (C) 2003 Elsevier Science B.V. All rights reserved.

引用

页码：133 / 137

页数：5

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