Vertically aligned carbon nanofibers as sacrificial templates for nanofluidic structures

被引：29

作者：

Melechko, AV ^{[1
]}

McKnight, TE

Guillorn, MA

Merkulov, VI

Ilic, B

Doktycz, MJ

Lowndes, DH

Simpson, ML

机构：

[1] Oak Ridge Natl Lab, Mol Scale Engn & Nanoscale Technol Res Grp, Oak Ridge, TN 37831 USA

[2] Cornell Univ, Sch Appl & Engn Phys, Ithaca, NY 14853 USA

[3] Oak Ridge Natl Lab, Div Life Sci, Oak Ridge, TN 37831 USA

[4] Oak Ridge Natl Lab, Condensed Matter Sci Div, Oak Ridge, TN 37831 USA

[5] Univ Tennessee, Dept Elect & Comp Engn, Knoxville, TN 37996 USA

[6] Univ Tennessee, Ctr Environm Biotechnol, Knoxville, TN 37996 USA

[7] Univ Tennessee, Dept Mat Sci & Engn, Knoxville, TN 37996 USA

来源：

APPLIED PHYSICS LETTERS | 2003年 / 82卷 / 06期

关键词：

D O I：

10.1063/1.1544058

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We report a method to fabricate nanoscale pipes ("nanopipes") suitable for fluidic transport. Vertically aligned carbon nanofibers grown by plasma-enhanced chemical vapor deposition are used as sacrificial templates for nanopipes with internal diameters as small as 30 nm and lengths up to several micrometers that are oriented perpendicular to the substrate. This method provides a high level of control over the nanopipe location, number, length, and diameter, permitting them to be deterministically positioned on a substrate and arranged into arrays. (C) 2003 American Institute of Physics.

引用

页码：976 / 978

页数：3

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