Cold atmospheric plasma deposition of diamond

被引:5
作者
Bardos, Ladislav [1 ]
Barankova, Hana [1 ]
机构
[1] Univ Uppsala, Angstrom Lab, Plasma Grp, S-75121 Uppsala, Sweden
关键词
D O I
10.1002/ppap.200700005
中图分类号
O59 [应用物理学];
学科分类号
摘要
Nanocluster diamonds can be systhesized in open air on stainless steel and molybdenum substrates with a hybrid cold atmospheric plasma source using air plasma and an air + alcohol mixture. At microwave powers below 300 W and at gas flow rates below 300 sccm the temperature of a thermaly insulated steel substrate placed 1.5 cm from the hollow cathode caused by the air plasma were less than 600 degrees C. 200 nm thick coatings exhibiting diamond peaks in the Raman spectra at 1325 cm(-1) on Mo were formed after 1 h on untreated substrates.
引用
收藏
页码:511 / 514
页数:4
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