High-speed X-cut thin-sheet LiNbO3 optical modulator with folded structure

We propose a small-footprint X-cut thin-sheet LiNbO3 optical modulator with high-speed and low-driving-voltage characteristics. Since an optical waveguide is folded by a mirror placed at one edge of the modulation chip, the chip can be shortened by about half. In addition, a wide modulation bandwidth can be achieved, because the path-length difference between the optical waveguide and the coplanar-waveguide (CPW) electrode is decreased to as short as possible by placing the CPW electrode as far as possible along the optical waveguide in the folded portion, and the microwave effective index is set to realize effective velocity matching between the lightwave and the microwave. A small footprint of 1.78 x 29 mm, a low half-wave voltage of 2.0 V at dc, and a 3-dBe modulation bandwidth of 20 GHz were obtained.