Advanced Process Control of Mix-Product Semiconductor Processes

被引：0

作者：

Chen, Juhn-Horng ^{[1
]}

Chiou, Horng-Shing ^{[2
]}

Weng, Wei-Tai ^{[3
]}

Tsai, Shun-An ^{[1
]}

机构：

[1] Chung Hua Univ, Dept Mech Engn, Hsinchu, Taiwan

[2] Technol & Sci Inst Northern Taiwan, Dept Elect Engn, Taipei, Taiwan

[3] Ming Chi Univ Technol, Dept Ind Engn & Management, Taipei, Taiwan

来源：

EBM 2010: INTERNATIONAL CONFERENCE ON ENGINEERING AND BUSINESS MANAGEMENT, VOLS 1-8 | 2010年

关键词：

Mix-Product; Semiconductor Processes; Run-To-Run Control; Measurement Delay; TO-RUN CONTROL;

D O I：

暂无

中图分类号：

C93 [管理学];

学科分类号：

12 ; 1201 ; 1202 ; 120202 ;

摘要：

This paper developed an advanced control technique for mix-product semiconductor processes with measurement delay. The conventional run-to-run process control for single-type-product processes was improved to that for mix-product processes through individually estimating the disturbances induced by tools and products. Simulation results show that, for mix-product processes with measurement delay, the performance of the proposed controller is superior to that of the independent D-EWMA controller.

引用

页码：2032 / +

页数：2

共 4 条

[1] Just-in-time adaptive disturbance estimation for run-to-run control of semiconductor processes [J].