Linear and nonlinear approaches towards amplitude modulation atomic force microscopy

被引:13
作者
Delnavaz, Aidin [1 ]
Mahmoodi, S. Nima [2 ]
Jalili, Nader [3 ]
Zohoor, Hassan [1 ,4 ]
机构
[1] Sharif Univ Technol, CEDRA, Tehran 113659567, Iran
[2] Virginia Tech, Ctr Vehicle Syst & Safety, Blacksburg, VA 24061 USA
[3] Northeastern Univ, Piezoact Syst Lab, Dept Mech & Ind Engn, Boston, MA 02115 USA
[4] IR Iran, Acad Sci, Tehran, Iran
关键词
Amplitude modulation atomic force microscopy; Distributed-parameters modeling of microcantilever; Nonlinear vibration; INTERMITTENT CONTACT; TIP; DYNAMICS; SURFACE;
D O I
10.1016/j.cap.2010.05.006
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Frequency response behavior of microcantilever is analytically and experimentally investigated in amplitude modulation Atomic Force Microscopy (AFM). AFM microcantilever probe is modeled as a continuous beam, and tip-sample interaction force is considered to include both attractive and repulsive force regimes. The developed model is compared with the linear lumped-parameters model that has been extensively used in the literature so far. Experimental measurements are also provided for the frequency response of a typical microcantilever-sample system to demonstrate the advantages of the developed model over the linear formulation. The results indicate that the nonlinear continuous model is more accurate, particularly in the estimation of the saturated amplitude value and frequency zone in which the tip-sample contact happens. (C) 2010 Elsevier B.V. All rights reserved.
引用
收藏
页码:1416 / 1421
页数:6
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