Highly stable and sensitive humidity sensors based on quartz crystal microbalance coated with hexagonal lamelliform monodisperse mesoporous silica SBA-15 thin film

被引：73

作者：

Zhu, Yongheng ^{[1
]}

Yuan, Hao ^{[2
]}

Xu, Jiaqiang ^{[1
,3
]}

Xu, Pengcheng ^{[3
]}

Pan, Qingyi ^{[1
]}

机构：

[1] Shanghai Univ, Dept Chem, Coll Sci, Shanghai 200444, Peoples R China

[2] Shanghai Second Polytech Univ, Sch Urban Dev & Environm Engn, Shanghai 201209, Peoples R China

[3] Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Transducer Technol, Shanghai 200050, Peoples R China

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2010年 / 144卷 / 01期

关键词：

Mesoporous silica; SBA-15 thin film; Quartz crystal microbalance; Humidity sensor; COMPOSITE-MATERIAL; MOLECULAR-SIEVES; ZNO NANOTETRAPODS; NANOPARTICLES; CONFINEMENT; COPOLYMER; TRIBLOCK;

D O I：

10.1016/j.snb.2009.10.053

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

A novel mesoporous silica SBA-15 with monodisperse hexagonal lamelliform was prepared, and deposited on the quartz crystal microbalances (QCMs) to construct highly stable and sensitive humidity sensors. The humidity sensing characteristics of the sensors were investigated by measuring the resonant frequency shift of QCMs due to the additional mass loading caused by adsorption of water. X-ray diffraction, nitrogen adsorption/desorption, transmission electron microscopy and field emission scanning electron microscopy were employed to characterize these sensing materials. The results showed that the sensors had high sensitivity, good stability, short response/recovery time, well reproducibility and narrow hysteresis. Herein, not only a novel and low-cost humidity sensor material was exploited, but also a new application area for mesoporous materials was opened Lip. (C) 2009 Elsevier B.V. All rights reserved.

引用

页码：164 / 169

页数：6

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