Power durability of Al-W alloy electrodes used in RF-band surface acoustic wave filters

被引：12

作者：

Kimura, N ^{[1
]}

Nakano, M ^{[1
]}

Sato, K ^{[1
]}

机构：

[1] TDK Corp, Adv Prod Dev Ctr, Chiba 272, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1998年 / 37卷 / 3A期

关键词：

surface acoustic wave device; SAW filter; power durability; electrode material; Al-W alloy film; hillock; whisker;

D O I：

10.1143/JJAP.37.1017

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

For the RF-band surface acoustic wave (SAW) filters, the power durability of Al-W alloy electrodes was studied. It was shown that the power durability of Al-0.5 at.% W alloy electrodes is superior to that of the Al-0.5 at.% Ti alloy electrodes which have been known as power-durable electrodes. The amount of hillocks decreases as the W content in the Al-W alloy increases, on the other hand, the lifetime of the electrodes is maximized at a W content of 0.5 at.%. These phenomena suggest that the whiskers, instead of hillocks, grown on the sides of the electrodes, cause the electrical short between the hot and the ground electrodes and suppress the lifetime increase.

引用

页码：1017 / 1020

页数：4

共 20 条

[1] Power durability of Al-W alloy electrodes used in RF-band surface acoustic wave filters
Kimura, Noritoshi
Nakano, Masahiro
Sato, Katsuo
Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes & Review Papers, 1998, 37 (3 A): : 1017 - 1020
[2] Study on power durability of Ti-containing Al surface acoustic wave electrodes, using interdigitated interdigital transducer filters
Ota, Yasuhiro, 1600, JJAP, Minato-ku, Japan (34):
[3] The power durability of 900 MHz band double-mode-type surface acoustic wave filters and improvement in power durability of Al-Cu thin film electrodes by Cu atom segregation
Kimura, N
Nakano, M
Nakazawa, M
Sato, K
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1997, 36 (5B): : 3101 - 3106
[4] Power durability of 900 MHz band double-mode-type surface acoustic wave filters and improvement in power durability of Al-Cu thin film electrodes by Cu atom segregation
TDK Corp, Chiba, Japan
Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes & Review Papers, 1997, 36 (5 B): : 3101 - 3106
[5] Enhanced power durability of surface acoustic wave filter with Al/Ti/Cu/Ti electrodes
Zeng, Fei (zengfei@mail.tsinghua.edu.cn), 2018, Elsevier Ltd (740)
[6] Enhanced power durability of surface acoustic wave filter with Al/Ti/Cu/Ti electrodes
Li, Qi
Fu, Sulei
Wang, Rong
Song, Cheng
Zeng, Fei
Pan, Feng
JOURNAL OF ALLOYS AND COMPOUNDS, 2018, 740 : 222 - 228
[7] STUDY ON POWER DURABILITY OF TI-CONTAINING AL SURFACE-ACOUSTIC-WAVE ELECTRODES, USING INTERDIGITATED INTERDIGITAL TRANSDUCER FILTERS
OTA, Y
YUHARA, A
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1995, 34 (5B): : 2693 - 2697
[8] IMPROVED POWER DURABILITY OF SURFACE-ACOUSTIC-WAVE FILTERS FOR AN ANTENNA DUPLEXERS
NISHIHARA, T
UCHISHIBA, H
IKATA, O
SATOH, Y
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1995, 34 (5B): : 2688 - 2692
[9] Power durability of highly textured Al electrode in surface acoustic wave devices
Matsukura, N.
Kamijo, A.
Ootsuka, E.
Takahashi, Y.
Sakairi, N.
Yamamoto, Y.
Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes & Review Papers, 1996, 35 (5 B): : 2983 - 2986
[10] Power durability of highly textured Al electrode in surface acoustic wave devices
Matsukura, N
Kamijo, A
Ootsuka, E
Takahashi, Y
Sakairi, N
Yamamoto, Y
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1996, 35 (5B): : 2983 - 2986

← 1 2 →