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Surface Energy Driven Cubic-to-Hexagonal Grain Growth of Ge2Sb2Te5 Thin Film
被引:29
作者:
Zheng, Yonghui
[1
,2
]
Cheng, Yan
[1
]
Huang, Rong
[3
]
Qi, Ruijuan
[3
]
Rao, Feng
[1
]
Ding, Keyuan
[1
,2
]
Yin, Weijun
[1
]
Song, Sannian
[1
]
Liu, Weili
[1
]
Song, Zhitang
[1
]
Feng, Songlin
[1
]
机构:
[1] Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Funct Mat Informat, Shanghai 200050, Peoples R China
[2] Univ Chinese Acad Sci, Beijing 100049, Peoples R China
[3] East China Normal Univ, Minist Educ, Key Lab Polar Mat & Devices, Shanghai 200062, Peoples R China
来源:
SCIENTIFIC REPORTS
|
2017年
/
7卷
基金:
中国国家自然科学基金;
关键词:
TRANSMISSION ELECTRON-MICROSCOPY;
PHASE-CHANGE;
CRYSTALLIZATION;
TRANSFORMATION;
TRANSITIONS;
D O I:
10.1038/s41598-017-06426-2
中图分类号:
O [数理科学和化学];
P [天文学、地球科学];
Q [生物科学];
N [自然科学总论];
学科分类号:
07 ;
0710 ;
09 ;
摘要:
Phase change memory (PCM) is a promising nonvolatile memory to reform current commercial computing system. Inhibiting face-centered cubic (f-) to hexagonal (h-) phase transition of Ge2Sb2Te5 (GST) thin film is essential for realizing high-density, high-speed, and low-power PCM. Although the atomic configurations of f- and h-lattices of GST alloy and the transition mechanisms have been extensively studied, the real transition process should be more complex than previous explanations, e.g. vacancy-ordering model for f-to-h transition. In this study, dynamic crystallization procedure of GST thin film was directly characterized by in situ heating transmission electron microscopy. We reveal that the equilibrium to h-phase is more like an abnormal grain growth process driven by surface energy anisotropy. More specifically, [0001]-oriented h-grains with the lowest surface energy grow much faster by consuming surrounding small grains, no matter what the crystallographic reconfigurations would be on the frontier grain-growth boundaries. We argue the widely accepted vacancy-ordering mechanism may not be indispensable for the large-scale f-to-h grain growth procedure. The real-time observations in this work contribute to a more comprehensive understanding of the crystallization behavior of GST thin film and can be essential for guiding its optimization to achieve high-performance PCM applications.
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页数:8
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