Correction of iso-focal tilt in phase edge lithography by adjustment of primary spherical aberration

被引：0
|
作者：
Nakao, S [1 ]
Tsujita, K [1 ]
Arimoto, I [1 ]
Wakamiya, W [1 ]
机构：
[1] Mitsubishi Elect Corp, ULSI Dev Ctr, Itami, Hyogo 6648641, Japan
来源：
MICROPROCESSES AND NANOTECHNOLOGY 2000, DIGEST OF PAPERS | 2000年
关键词：
D O I：
10.1109/IMNC.2000.872611
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：38 / 39
页数：2
相关论文
共 18 条
  • [1] Basic imaging characteristics of phase edge lithography and impact of lens aberration on these
    Nakao, S
    Kanai, I
    Tsujita, K
    Arimoto, I
    Wakamiya, W
    OPTICAL MICROLITHOGRAPHY XIII, PTS 1 AND 2, 2000, 4000 : 1287 - 1298
  • [2] Simple system of aberration correction for very large spherical primary mirrors
    Beach, D
    CURRENT DEVELOPMENTS IN LENS DESIGN AND OPTICAL SYSTEMS ENGINEERING, 2000, 4093 : 319 - 324
  • [3] Correction of spherical aberration in multi-focal multiphoton microscopy with spatial light modulator
    Matsumoto, Naoya
    Konno, Alu
    Ohbayashi, Yasushi
    Inoue, Takashi
    Matsumoto, Akiyuki
    Uchimura, Kenji
    Kadomatsu, Kenji
    Okazaki, Shigetoshi
    OPTICS EXPRESS, 2017, 25 (06): : 7055 - 7068
  • [4] Wavefront spacing and Gouy phase in presence of primary spherical aberration
    Pang, Xiaoyan
    Fischer, David G.
    Visser, Taco D.
    OPTICS LETTERS, 2014, 39 (01) : 88 - 91
  • [5] Phase plates for generation of variable amounts of primary spherical aberration
    Acosta, Eva
    Sasian, Jose
    OPTICS EXPRESS, 2011, 19 (14): : 13171 - 13178
  • [6] Ablation profiles for wavefront-guided correction of myopia and primary spherical aberration
    Manns, F
    Ho, A
    Parel, JM
    Culbertson, W
    JOURNAL OF CATARACT AND REFRACTIVE SURGERY, 2002, 28 (05): : 766 - 774
  • [7] CD control in phase-edge lithography - the effects of lens aberration and pattern layout
    Hagiwara, T
    Hayano, K
    Moniwa, A
    Fukuda, H
    OPTICAL MICROLITHOGRAPHY XV, PTS 1 AND 2, 2002, 4691 : 1021 - 1032
  • [8] EFFECTS OF DEFOCUS AND PRIMARY SPHERICAL-ABERRATION ON IMAGES OF A STRAIGHT EDGE IN CONFOCAL MICROSCOPY
    GU, M
    SHEPPARD, CJR
    APPLIED OPTICS, 1994, 33 (04): : 625 - 630
  • [9] CORRECTION OF SPHERICAL-ABERRATION OF A SHORT-FOCAL-LENGTH MAGNETIC LENS USING A FOIL LENS
    HIBINO, M
    SUGIYAMA, S
    MARUSE, S
    JOURNAL OF ELECTRON MICROSCOPY, 1977, 26 (03): : 240 - 240
  • [10] The application of spherical aberration correction and focal series restoration to high-resolution images of platinum nanocatalyst particles
    Gontard, L. Cervera
    Chang, L-Y
    Dunin-Borkowski, R. E.
    Kirkland, A. I.
    D Hetherington, C. J.
    Ozkaya, D.
    EMAG-NANO 2005: IMAGING, ANALYSIS AND FABRICATION ON THE NANOSCALE, 2006, 26 : 25 - +
12