Van der Waals epitaxy of functional MoO2 film on mica for flexible electronics

被引:93
|
作者
Ma, Chun-Hao [1 ,2 ]
Lin, Jheng-Cyuan [3 ]
Liu, Heng-Jui [2 ]
Thi Hien Do [2 ]
Zhu, Yuan-Min [4 ]
Thai Duy Ha [5 ]
Zhan, Qian [4 ]
Juang, Jenh-Yih [5 ]
He, Qing [6 ]
Arenholz, Elke [7 ]
Chiu, Po-Wen [1 ,8 ]
Chu, Ying-Hao [2 ,3 ,5 ]
机构
[1] Natl Tsing Hua Univ, Dept Elect Engn, Hsinchu 30013, Taiwan
[2] Natl Chiao Tung Univ, Dept Mat Sci & Engn, Hsinchu 30010, Taiwan
[3] Acad Sinica, Inst Phys, Taipei 11529, Taiwan
[4] Univ Sci & Technol Beijing, Sch Mat Sci & Engn, Beijing 100083, Peoples R China
[5] Natl Chiao Tung Univ, Dept Electrophys, Hsinchu 30010, Taiwan
[6] Univ Durham, Dept Phys, Durham DH1 3LE, England
[7] Lawrence Berkeley Natl Lab, Adv Light Source, Berkeley, CA 94720 USA
[8] Acad Sinica, Inst Atom & Mol Sci, Taipei 10617, Taiwan
基金
英国工程与自然科学研究理事会; 中国国家自然科学基金;
关键词
SINGLE-LAYER MOS2; OXIDE INTERFACES; GRAPHENE FILMS; GROWTH; TRANSPARENT; PHASE; ZNO;
D O I
10.1063/1.4954172
中图分类号
O59 [应用物理学];
学科分类号
摘要
Flexible electronics have a great potential to impact consumer electronics and with that our daily life. Currently, no direct growth of epitaxial functional oxides on commercially available flexible substrates is possible. In this study, in order to address this challenge, muscovite, a common layered oxide, is used as a flexible substrate that is chemically similar to typical functional oxides. We fabricated epitaxial MoO2 films on muscovite via pulsed laser deposition technique. A combination of X-ray diffraction and transmission electron microscopy confirms van der Waals epitaxy of the heterostructures. The electrical transport properties of MoO2 films are similar to those of the bulk. Flexible or free-standing MoO2 thin film can be obtained and serve as a template to integrate additional functional oxide layers. Our study demonstrates a remarkable concept to create flexible electronics based on functional oxides. Published by AIP Publishing.
引用
收藏
页数:5
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