共 34 条
- [2] Boyd S., 1994, LINEAR MATRIX INEQUA, V15
- [3] Fabrication and characterization of DRIE-micromachined electrostatic microactuators for hard disk drives [J]. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2007, 13 (01): : 11 - 19