Spider Web-Shaped Phononic Crystals for Quality Factor Improvement of Piezoelectric-on-Silicon MEMS resonators

被引：0
作者：
Wu, Xueqian [1 ]
Bao, Feihong [2 ]
Zhou, Xin [2 ]
Wu, Qidie [1 ]
Liu, Jiacheng [2 ]
Bao, Jingfu [2 ]
机构：
[1] Univ Elect Sci & Technol China, Yingcai Honors Coll, Chengdu, Peoples R China
[2] Univ Elect Sci & Technol China, Sch Elect Sci & Engn, Chengdu, Peoples R China
来源：
2019 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS) | 2019年
基金：
中国国家自然科学基金;
关键词：
MEMS resonator; Phononic crystals; Quality factor; Anchor loss;
D O I：
10.1109/ultsym.2019.8926212
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper shows the approach to significantly reduce the energy dissipation of thin-film piezoelectric-on-silicon (TPoS) micro-electro-mechanical systems (MEMS) resonator by employing a 2D innovative lightweight spider web-shape phononic crystals (PnC) structure. An AlN-on-Si MEMS resonator, which is working at 40 MHz 5th-order width-extensional (WE) resonant mode, is selected to investigate the energy dissipation reduction by the proposed PnC. According to the simulation results, the proposed PnC structure shows a complete acoustic bandgap from 37 MHz to 44 MHz and can significantly reduce the energy loss. Moreover, the anchor loss (Q(anc)) of the resonator reached 2,090,000 at 40.03 MHz.
引用
收藏
页码：1724 / 1726
页数：3
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