Plasma Parameters in a Dual-Camera Low-Power Inductive RF Discharge with an External Magnetic Field

被引：2

作者：

Petrov, A. K. ^{[1
]}

Vavilin, K. V. ^{[1
]}

Kozlov, G. P. ^{[1
]}

Kralkina, E. A. ^{[1
]}

Nekliudova, P. A. ^{[1
]}

Nikonov, A. M. ^{[1
]}

Pavlov, V. B. ^{[1
]}

机构：

[1] Moscow MV Lomonosov State Univ, Dept Phys, Moscow 119991, Russia

来源：

MOSCOW UNIVERSITY PHYSICS BULLETIN | 2015年 / 70卷 / 06期

关键词：

plasma; helicon; Trivelpiece-Gould wave; inductive; RF; HELICON PLASMA; FREQUENCY; VOLUME; WAVES; GASES;

D O I：

10.3103/S0027134915060144

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

The results from studying a dual-camera inductive radio-frequency (RF) discharge that was placed in an external magnetic field are presented. The operating conditions were as follows: an argon pressure of 5 x 10(-5)-6 x 10(-2) Torr, an external magnetic field strength of 0-60 G, and an RF generator power supply of 25-300 W. During the experiment the resonant RF power consumption and the correspondence between the local power-consumption maxima and spatial maxima of the plasma concentration as a function of the external magnetic field were observed. The comparison of the experimental results with the results of the mathematical simulation indicates that the resonant character of the discharge is associated with the excitation of helicons and Trivelpiece-Gould waves.

引用

页码：527 / 535

页数：9

共 27 条

[1] Plasma parameters in a dual-camera low-power inductive RF discharge with an external magnetic field
A. K. Petrov
K. V. Vavilin
G. P. Kozlov
E. A. Kralkina
P. A. Nekliudova
A. M. Nikonov
V. B. Pavlov
Moscow University Physics Bulletin, 2015, 70 : 527 - 535
[2] Power absorption, plasma parameters and wave structure in inductive RF plasma source with low value external magnetic field
Kralkina, Elena
Vavilin, Konstantin
Zadiriev, Ilya
Nikonov, Alexander
PLASMA SCIENCE & TECHNOLOGY, 2020, 22 (11)
[3] RF power absorption by plasma of a low-pressure inductive discharge
Kralkina, E. A.
Rukhadze, A. A.
Pavlov, V. B.
Vavilin, K. V.
Nekliudova, P. A.
Petrov, A. K.
Alexandrov, A. F.
PLASMA SOURCES SCIENCE & TECHNOLOGY, 2016, 25 (01)
[4] Influence of external parameters on RF inductive discharge plasma characteristics
Kralkina, Elena
Nekludova, Polina
Nikonov, Aleksander
Vavilin, Konstantin
Zadiriev, Ilya
Tarakanov, Vladimir
PLASMA SOURCES SCIENCE & TECHNOLOGY, 2021, 30 (11)
[5] Axial Dependence of the Longitudinal RF Magnetic Field and Plasma Parameters in an Inductive Plasma Source with an External Magnetic Field
Nikonov, A. M.
Vavilin, K. V.
Zadiriev, I. I.
Kralkina, E. A.
PLASMA PHYSICS REPORTS, 2022, 48 (11) : 1189 - 1198
[6] Plasma parameters in a twin-chamber RF inductive plasma source, placed in a weak external magnetic field
Petrov, A. K.
Kralkina, E. A.
Nikonov, A. M.
Vavilin, K. V.
Zadiriev, I. I.
VACUUM, 2019, 169
[7] Axial Dependence of the Longitudinal RF Magnetic Field and Plasma Parameters in an Inductive Plasma Source with an External Magnetic Field
A. M. Nikonov
K. V. Vavilin
I. I. Zadiriev
E. A. Kralkina
Plasma Physics Reports, 2022, 48 : 1189 - 1198
[8] Frequency Dependence of Parameters of an Inductive RF Discharge Placed in a Weak Magnetic Field
Nikonov, A. M.
Vavilin, K. V.
Zadiriev, I. I.
Dvinin, S. A.
Kral'kina, E. A.
PLASMA PHYSICS REPORTS, 2024, 50 (01) : 77 - 88
[9] Self-consistent model of an RF inductive plasma source located in an external magnetic field
Aleksandrov, AF
Bugrov, GE
Kerimova, IF
Kondranin, SG
Kralkina, EA
Pavlov, VB
Plaksin, VY
Rukhadze, AA
Vavilin, KV
JOURNAL OF RUSSIAN LASER RESEARCH, 2003, 24 (04) : 301 - 321
[10] Structure of RF fields in a twin-chamber radio-frequency inductive plasma source placed in a weak external magnetic field
Petrov, A. K.
Kralkina, E. A.
Nikonov, A. M.
Vavilin, K. V.
Zadiriev, I. I.
VACUUM, 2020, 181

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