Microstructure of YBCO and YBCO/SrTiO3/YBCO* PLD thin films on sapphire for microwave applications

被引：0

作者：

Lorenz, M ^{[1
]}

Hochmuth, H ^{[1
]}

Natusch, D ^{[1
]}

Thärigen, T ^{[1
]}

Svetchnikov, VL ^{[1
]}

Zandbergen, HW ^{[1
]}

Schäfer, C ^{[1
]}

Kästner, G ^{[1
]}

Hesse, D ^{[1
]}

机构：

[1] Univ Leipzig, Fak Phys & Geowissensch, D-04103 Leipzig, Germany

来源：

MATERIALS ISSUES FOR TUNABLE RF AND MICROWAVE DEVICES | 2000年 / 603卷

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A large-area pulsed laser deposition process for high-quality YBa2Cu3O7-delta (YBCO) thin films on both sides of R-plane sapphire substrates with CeO2 buffer layer is used routinely to optimize planar microwave filters for satellite and mobile communication systems. With the experience of more than 700 double-sided 3-inch diam. YBCO:Ag films a high degree of reproducibility of j(c), values above 3.5 MA/cm(2) and of state of the art R-5 values is reached. TEM cross sections of the large-area and double-sided PLD-YBCO:Ag thin films on R-plane sapphire with CeO2 buffer layers show typical defects like stress modulation, stacking faults, a-axis oriented grains, precipitates and interdiffusion layers. YBCO films on SrTiO3 / YBCO* / CeO2 film systems on R-plane sapphire wafers have more growth defects compared to bare CeO2 buffers on sapphire but show as microwave resonators encouraging electrical tunability.

引用

页码：163 / 168

页数：6

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