The structure and dielectric properties of thin barium zirconate titanate films obtained by RF magnetron sputtering

被引：4

作者：

Tumarkin, A. V. ^{[1
]}

Razumov, S. V. ^{[1
]}

Gagarin, A. G. ^{[1
]}

Altynnikov, A. G. ^{[1
]}

Stozharov, V. M. ^{[2
]}

Kaptelov, E. Yu. ^{[3
]}

Senkevich, S. V. ^{[3
]}

Pronin, I. P. ^{[3
]}

机构：

[1] St Petersburg State Electrotech Univ, St Petersburg 197376, Russia

[2] Herzen State Pedag Univ, St Petersburg 191186, Russia

[3] Russian Acad Sci, Ioffe Phys Tech Inst, St Petersburg 194021, Russia

来源：

TECHNICAL PHYSICS LETTERS | 2016年 / 42卷 / 02期

基金：

俄罗斯基础研究基金会;

关键词：

Technical Physic Letter; Strontium Titanate; Ferroelectric Phase Transition; Ceramic Target; Zirconium Atom;

D O I：

10.1134/S1063785016020140

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Submicron thin layers of BaZr (x) Ti1-x O-3 are grown in-situ by RF magnetron sputtering of a ceramic target (x = 0.50) on a substrate of Pt/r-cut leucosapphire Al2O3. It is shown that the composition of the ferroelectric layer is not identical to the composition of the sputtered target and is shifted toward barium zirconate. The reasons for such behavior are discussed. The obtained samples are characterized by high breakdown voltages (1 MV/cm and higher). The structural and high-frequency dielectric properties are studied, and high tunability of the capacitance of thin layers is revealed.

引用

页码：143 / 145

页数：3

共 50 条

[1] The structure and dielectric properties of thin barium zirconate titanate films obtained by RF magnetron sputtering
A. V. Tumarkin
S. V. Razumov
A. G. Gagarin
A. G. Altynnikov
V. M. Stozharov
E. Yu. Kaptelov
S. V. Senkevich
I. P. Pronin
Technical Physics Letters, 2016, 42 : 143 - 145
[2] Characterization of Zn2SnO4 Thin Films Prepared by RF Magnetron Sputtering
Tian Yu Tang
Sheng Qiang Ren
Yuan Liu
Jing Quan Zhang
Cai Liu
Li Li Wu
Wen Wu Wang
Wei Li
Liang Huan Feng
Russian Journal of Physical Chemistry B, 2018, 12 : 503 - 509
[3] Characterization of Zn2SnO4 Thin Films Prepared by RF Magnetron Sputtering
Tang, Tian Yu
Ren, Sheng Qiang
Liu, Yuan
Zhang, Jing Quan
Liu, Cai
Wu, Li Li
Wang, Wen Wu
Li, Wei
Feng, Liang Huan
RUSSIAN JOURNAL OF PHYSICAL CHEMISTRY B, 2018, 12 (03) : 503 - 509
[4] Synthesis, microstructure and dielectric properties of zirconium doped barium strontium titanate obtained by solvothermal method
Wenxing Zhang
Lixin Cao
WenWen Wang
Ge Su
Wei Liu
Journal of Materials Science: Materials in Electronics, 2013, 24 : 2234 - 2239
[5] Peculiarities of crystallization of thin ferroelectric films of lead zirconate titanate
I. Yu. Tentilova
S. A. Kukushkin
E. Yu. Kaptelov
I. P. Pronin
V. L. Ugolkov
Technical Physics Letters, 2011, 37 : 163 - 165
[6] Initial Stages of Growth of Barium Zirconate Titanate and Barium Stannate Titanate Films on Single-Crystal Sapphire and Silicon Carbide
Tumarkin, A. V.
Zlygostov, M. V.
Serenkov, I. T.
Sakharov, V. I.
Afrosimov, V. V.
Odinets, A. A.
PHYSICS OF THE SOLID STATE, 2018, 60 (10) : 2091 - 2096
[7] Peculiarities of crystallization of thin ferroelectric films of lead zirconate titanate
Tentilova, I. Yu.
Kukushkin, S. A.
Kaptelov, E. Yu.
Pronin, I. P.
Ugolkov, V. L.
TECHNICAL PHYSICS LETTERS, 2011, 37 (02) : 163 - 165
[8] On the dielectric and ferroelectric properties of Ba0.75Sr0.25TiO3 thin films deposited by RF Sputtering
Mancilla, Juana E.
Rivera, Jesus N.
Hernandez, Carlos A.
Zapata, Martin G.
JOURNAL OF THE AUSTRALIAN CERAMIC SOCIETY, 2012, 48 (02): : 223 - 226
[9] Modulating the Effect of Yttrium Doping on the Structural and Dielectric Properties of Barium Titanate
Kumar, Sachin
Thakur, Om Prakash
Luthra, Vandna
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2018, 215 (07):
[10] Uniaxial stress dependence of the dielectric properties of barium titanate single crystals
Suchanicz, J.
Sitko, D.
PHASE TRANSITIONS, 2016, 89 (10) : 986 - 995

← 1 2 3 4 5 →