Large-scale nanoshaping of ultrasmooth 3D crystalline metallic structures

被引：193
作者：
Gao, Huang [1 ,3 ]
Hu, Yaowu [1 ,3 ]
Xuan, Yi [2 ,3 ]
Li, Ji [1 ,3 ]
Yang, Yingling [1 ,3 ]
Martinez, Ramses V. [4 ,5 ]
Li, Chunyu [3 ,6 ]
Luo, Jian [7 ]
Qi, Minghao [2 ,3 ]
Cheng, Gary J. [1 ,3 ,8 ]
机构：
[1] Purdue Univ, Sch Ind Engn, W Lafayette, IN 47907 USA
[2] Purdue Univ, Sch Elect & Comp Engn, W Lafayette, IN 47907 USA
[3] Purdue Univ, Birck Nanotechnol Ctr, W Lafayette, IN 47907 USA
[4] Harvard Univ, Dept Chem & Chem Biol, Cambridge, MA 02138 USA
[5] IMDEA Nanosci, Madrid Inst Adv Studies, Madrid 28049, Spain
[6] Purdue Univ, Sch Mat Engn, W Lafayette, IN 47907 USA
[7] Univ Calif San Diego, Dept NanoEngn, La Jolla, CA 92093 USA
[8] Purdue Univ, Sch Mech Engn, W Lafayette, IN 47907 USA
来源：
SCIENCE | 2014年 / 346卷 / 6215期
基金：
美国国家科学基金会;
关键词：
MICROMETER-SCALE; DIRECT IMPRINT; PLASMONICS; ALLOYS; SUPERPLASTICITY; NANOSTRUCTURES; METAMATERIALS; LITHOGRAPHY; COMPOSITES; PLASTICITY;
D O I：
10.1126/science.1260139
中图分类号：
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号：
07 ; 0710 ; 09 ;
摘要：
We report a low-cost, high-throughput benchtop method that enables thin layers of metal to be shaped with nanoscale precision by generating ultrahigh-strain-rate deformations. Laser shock imprinting can create three-dimensional crystalline metallic structures as small as 10 nanometers with ultrasmooth surfaces at ambient conditions. This technique enables the successful fabrications of large-area, uniform nanopatterns with aspect ratios as high as 5 for plasmonic and sensing applications, as well as mechanically strengthened nanostructures and metal-graphene hybrid nanodevices.
引用
收藏
页码：1352 / 1356
页数：5
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