Large-scale nanoshaping of ultrasmooth 3D crystalline metallic structures

被引：193

作者：

Gao, Huang ^{[1
,3
]}

Hu, Yaowu ^{[1
,3
]}

Xuan, Yi ^{[2
,3
]}

Li, Ji ^{[1
,3
]}

Yang, Yingling ^{[1
,3
]}

Martinez, Ramses V. ^{[4
,5
]}

Li, Chunyu ^{[3
,6
]}

Luo, Jian ^{[7
]}

Qi, Minghao ^{[2
,3
]}

Cheng, Gary J. ^{[1
,3
,8
]}

机构：

[1] Purdue Univ, Sch Ind Engn, W Lafayette, IN 47907 USA

[2] Purdue Univ, Sch Elect & Comp Engn, W Lafayette, IN 47907 USA

[3] Purdue Univ, Birck Nanotechnol Ctr, W Lafayette, IN 47907 USA

[4] Harvard Univ, Dept Chem & Chem Biol, Cambridge, MA 02138 USA

[5] IMDEA Nanosci, Madrid Inst Adv Studies, Madrid 28049, Spain

[6] Purdue Univ, Sch Mat Engn, W Lafayette, IN 47907 USA

[7] Univ Calif San Diego, Dept NanoEngn, La Jolla, CA 92093 USA

[8] Purdue Univ, Sch Mech Engn, W Lafayette, IN 47907 USA

来源：

SCIENCE | 2014年 / 346卷 / 6215期

基金：

美国国家科学基金会;

关键词：

MICROMETER-SCALE; DIRECT IMPRINT; PLASMONICS; ALLOYS; SUPERPLASTICITY; NANOSTRUCTURES; METAMATERIALS; LITHOGRAPHY; COMPOSITES; PLASTICITY;

D O I：

10.1126/science.1260139

中图分类号：

O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];

学科分类号：

07 ; 0710 ; 09 ;

摘要：

We report a low-cost, high-throughput benchtop method that enables thin layers of metal to be shaped with nanoscale precision by generating ultrahigh-strain-rate deformations. Laser shock imprinting can create three-dimensional crystalline metallic structures as small as 10 nanometers with ultrasmooth surfaces at ambient conditions. This technique enables the successful fabrications of large-area, uniform nanopatterns with aspect ratios as high as 5 for plasmonic and sensing applications, as well as mechanically strengthened nanostructures and metal-graphene hybrid nanodevices.

引用

页码：1352 / 1356

页数：5

共 30 条

[1] Channel plasmon-polariton guiding by subwavelength metal grooves [J].

Bozhevolnyi, SI ;

Volkov, VS ;

Devaux, E ;

Ebbesen, TW .

PHYSICAL REVIEW LETTERS, 2005, 95 (04)

[2] Ultrafast and direct imprint of nanostructures in silicon [J].

Chou, SY ;

Keimel, C ;

Gu, J .

NATURE, 2002, 417 (6891) :835-837

[3] Imprint lithography with 25-nanometer resolution [J].

Chou, SY ;

Krauss, PR ;

Renstrom, PJ .

SCIENCE, 1996, 272 (5258) :85-87

[4] Dislocation avalanches, strain bursts, and the problem of plastic forming at the micrometer scale [J].

Csikor, Ferenc F. ;

Motz, Christian ;

Weygand, Daniel ;

Zaiser, Michael ;

Zapperi, Stefano .

SCIENCE, 2007, 318 (5848) :251-254

[5] Ultrafast direct imprinting of nanostructures in metals by pulsed laser melting [J].

Cui, Bo ;

Keimel, Chris ;

Chou, Stephen Y. .

NANOTECHNOLOGY, 2010, 21 (04)

[6] PHYSICAL STUDY OF LASER-PRODUCED PLASMA IN CONFINED GEOMETRY [J].

FABBRO, R ;

FOURNIER, J ;

BALLARD, P ;

DEVAUX, D ;

VIRMONT, J .

JOURNAL OF APPLIED PHYSICS, 1990, 68 (02) :775-784

[7] Plasmonics beyond the diffraction limit [J].

Gramotnev, Dmitri K. ;

Bozhevolnyi, Sergey I. .

NATURE PHOTONICS, 2010, 4 (02) :83-91

[8] Plasticity in small-sized metallic systems: Intrinsic versus extrinsic size effect [J].

Greer, Julia R. ;

De Hosson, Jeff Th. M. .

PROGRESS IN MATERIALS SCIENCE, 2011, 56 (06) :654-724

[9] Nanoimprint lithography: Methods and material requirements [J].

Guo, L. Jay .

ADVANCED MATERIALS, 2007, 19 (04) :495-513

[10] Nanomoulding with amorphous metals [J].

Kumar, Golden ;

Tang, Hong X. ;

Schroers, Jan .

NATURE, 2009, 457 (7231) :868-872

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