Low-temperature fabrication of red phosphor Ca0.997Pr0.002TiO3 thin film using excimer laser assisted metal organic deposition

Ca0.997Pr0.002TiO3 thin films that show strong red luminescence were successfully prepared by an excimer laser assisted metal organic deposition (ELAMOD) process at temperatures from 25 to 400 degrees C. Laser irradiation induced an oxygen deficiency in the film. Oxygen annealing at 500 degrees C eliminated the oxygen vacancy and remarkably improved the emission intensity. The crystallinity of the film prepared by the ELAMOD exceeded that of the film prepared by a conventional thermal metal organic deposition (MOD) process at 900 degrees C. The photoluminescence emission of the film prepared by the ELAMOD process at 250 degrees C followed by oxygen annealing at 500 degrees C was stronger than that of the film fabricated by the thermal process at 900 degrees C.