Suppression of fundamental-frequency phase errors in phase-shifting interferometry

被引:5
作者
Burke, Jan [1 ]
机构
[1] CSIRO Mat Sci & Engn, Australian Ctr Precis Opt, Lindfield, NSW 2070, Australia
关键词
ALGORITHMS; SURFACES;
D O I
10.1364/OL.35.002079
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
I develop and test several new phase-shifting formulas for a Fizeau interferometer, using a spherical cavity of high NA. The associated phase-shift miscalibrations provide a useful range for testing phase-shift error compensation experimentally. After removing the "double-frequency" cyclic phase variation from the error-fringe pattern by well-known methods, the residual phase oscillations occur mainly at 1 and 3 times the fringe frequency. The latter can be addressed by the theory of characteristic polynomials; the former cannot, but is removed by a variation on known averaging methods, and allows empirical optimization of phase-reconstruction performance, which can then be analyzed with characteristic polynomials again. (C) 2010 Optical Society of America
引用
收藏
页码:2079 / 2081
页数:3
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